Ionization gauge for high pressure operation

Patent metadata

Field	Value
Publication number	US-9952113-B2
Application number	US-201715421805-A
Country	US
Kind code	B2
Filing date	Feb 1, 2017
Priority date	Feb 8, 2012
Publication date	Apr 24, 2018
Grant date	Apr 24, 2018

Abstract

An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

First claim

What is claimed is:

1. An ionization gauge to measure pressure comprising:
an anode structure comprising a grid defining an ionization volume in which electrons impact gas molecules and atoms;
an electron source that emits electrons;
a first collector electrode to collect ions formed by collisions between the electrons and gas molecules and atoms, to provide a gas pressure output; and
a first shade outside of the ionization volume, the first shade being located between the electron source and the first collector electrode to shield the electron source from sputtered atoms along straight paths from the first collector electrode, one of the first collector electrode and the electron source being located inside the anode structure, and the other of the first collector electrode and the electron source being located outside the anode structure, the first shade being at an electric potential that is the same as or lower than the potential of the electron source, electrons from the electron source being directed by electric fields around the shade into the ionization volume.

2. The ionization gauge of claim 1 , wherein the grid is a cylindrical grid.

3. The ionization gauge of claim 1 , wherein the source that emits electrons is located inside the anode structure and the first collector electrode is located outside the anode structure.

4. The ionization gauge of claim 1 , wherein the source that emits electrons is a hot cathode.

5. The ionization gauge of claim 4 , wherein the hot cathode is a ribbon filament having a flat surface oriented at about 90° with respect to the first collector electrode, such that the surface area of the filament facing the first collector electrode is minimized.

6. The ionization gauge of claim 1 , wherein the source that emits electrons is located outside the anode structure and the first collector electrode is located inside the anode structure, and the ionization volume is inside the anode structure.

7. The ionization gauge of claim 6 , further including a second collector electrode located inside the anode structure.

8. The ionization gauge of claim 6 , further including a third collector electrode located outside the anode structure, in between the first shade and the anode structure.

9. The ionization gauge of claim 1 , further including an envelope surrounding the electron source, the anode, and the first collector electrode.

10. The ionization gauge of claim 9 , further including a second shade located between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

11. A method of measuring pressure with an ionization gauge comprising:
emitting electrons from an electron source, the electrons colliding with gas molecules and atoms inside an anode structure comprising a cylindrical mesh grid that defines an ionization volume;
locating a first shade outside of the ionization volume between the electron source and a first collector electrode to shield the electron source from sputtered atoms along straight paths from the first collector electrode, one of the first collector electrode and the electron source being located inside the anode structure, and the other of the first collector electrode and the electron source being located outside the anode structure, the first shade being at an electric potential that is the same as or lower than the potential of the electron source, electrons from the electron source being directed by electric fields around the shade into the ionization volume; and
collecting ions formed by collisions between the electrons and gas molecules and atoms on the first collector electrode to provide a gas pressure output.

12. The method of claim 11 , wherein the pressure is in a range of between about 10 −1 Torr and about 10 −4 Torr.

13. The method of claim 11 , wherein the electron source that emits electrons is a microchannel plate.

14. The method of claim 11 , further including locating the source that emits electrons inside the anode structure and locating the first collector electrode outside the anode structure.

15. The method of claim 11 , wherein the electron source that emits electrons is a hot cathode.

16. The method of claim 15 , wherein the hot cathode is a ribbon filament having a flat surface oriented at about 90° with respect to the first collector electrode, such that the surface area of the filament facing the first collector electrode is minimized.

17. The method of claim 11 , further including locating the source that emits electrons outside the anode structure and locating the first collector electrode inside the anode structure.

18. The method of claim 17 , further including locating a second collector electrode inside the anode structure.

19. The method of claim 17 , further including locating a third collector electrode outside the anode structure, in between the first shade and the anode structure.

20. The method of claim 11 , further including surrounding the electron source, the anode, and the first collector electrode with an envelope.

21. The method of claim 20 , further including locating a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

Assignees

• Mks Instr Inc

Inventors

• Brucker Gerardo A

Classifications

• H01J41/02

  Discharge tubes for measuring pressure of introduced gas {or for detecting presence of gas} · CPC title

• G01L21/30

  by making use of ionisation effects · CPC title

• H01J1/52

  Screens for shielding; Guides for influencing the discharge; Masks interposed in the electron stream · CPC title

• H01J41/04

  with ionisation by means of thermionic cathodes · CPC title

• G01L21/32 Primary

  using electric discharge tubes with thermionic cathodes · CPC title