Large-area high-density plasma processing chamber for flat panel displays
US-2023272530-A1 · Aug 31, 2023 · US
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Sorensen Carl A patents
Sorensen Carl A holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 1 |
| First publication | Jun 2, 2015 |
| Latest publication | Aug 31, 2023 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Guided wave applicator with non-gaseous dielectric for plasma chamber
US-9397380-B2 · Jul 19, 2016 · US
Ground return for plasma processes
US-9382621-B2 · Jul 5, 2016 · US
Transmission line RF applicator for plasma chamber
US-9048518-B2 · Jun 2, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Large-area high-density plasma processing chamber for flat panel displays
US-2023272530-A1 · Aug 31, 2023 · US
Guided wave applicator with non-gaseous dielectric for plasma chamber
US-9397380-B2 · Jul 19, 2016 · US
Ground return for plasma processes
US-9382621-B2 · Jul 5, 2016 · US
Transmission line RF applicator for plasma chamber
US-9048518-B2 · Jun 2, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H05H1/46 | 2 |
| H01J2237/3325 | 1 |
| H01J2237/3323 | 1 |
| C23C16/505 | 1 |
| C23C16/45565 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 4 |
| Chemistry & Metallurgy | 2 |
| Cross-Sectional Technologies | 1 |