Chuck, lamination process, and manufacturing method of semiconductor package using the same
US-11993066-B2 · May 28, 2024 · US
US9370919B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9370919-B2 |
| Application number | US-201314347598-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 18, 2013 |
| Priority date | Oct 15, 2013 |
| Publication date | Jun 21, 2016 |
| Grant date | Jun 21, 2016 |
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The present invention provides a vacuum suction adjustable transfer roller and a film attachment method using the transfer roller. The transfer roller includes: a roller body ( 20 ) and a plurality of adjustment devices ( 40 ) mounted in the roller body ( 20 ). The roller body ( 20 ) includes a plurality of air draw-in passages ( 22 ) uniformly distributed therein. The air draw-in passages ( 22 ) draw in air by means of an air evacuation device. Each of the adjustment devices ( 40 ) includes: a valve ( 42 ) arranged in each of the air draw-in passages ( 22 ), a piezoelectric ceramic piece ( 44 ) connected to the valve ( 42 ), and a control circuit ( 46 ) electrically connected to the piezoelectric ceramic piece ( 44 ). The control circuit ( 46 ) controls the intensity of an electric field applied to the piezoelectric ceramic piece ( 44 ) so that the piezoelectric ceramic piece ( 44 ) undergoes deformation under the action of the electric field and the valve ( 42 ) is caused by the deformation of the piezoelectric ceramic piece ( 44 ) to selectively insert into or withdraw out of the air draw-in passages ( 22 ) so as to control flow of air drawn in by the air draw-in passages ( 22 ) and thus controlling the magnitude of a vacuum suction force induced by the air draw-in passages ( 22 ).
Opening claim text (preview).
What is claimed is: 1. A vacuum suction adjustable transfer roller, comprising: a roller body and a plurality of adjustment devices mounted to the roller body, the roller body comprising a plurality of air draw-in passages uniformly distributed therein, the air draw-in passages drawing in air by means of an air evacuation device, each of the adjustment devices comprising: a valve arranged in each of the air draw-in passages, a piezoelectric ceramic piece connected to the valve, and a control circuit electrically connected to the piezoelectric ceramic piece, the control circuit controlling an intensity of an electric field applied to the piezoelectric ceramic piece so that the piezoelectric ceramic piece undergoes deformation under the action of the electric field and the valve is caused by the deformation of the piezoelectric ceramic piece to selectively insert into or withdraw out of the air draw-in passage so as to control flow of air drawn in by the air draw-in passage and thus controlling a magnitude of a vacuum suction force induced by the air draw-in passage; and wherein the roller body comprises an insertion slot corresponding to each of the air draw-in passages and the valve selectively insertable into and removable out of the air draw-in passage through the insertion slot to selectively close and open the air draw-in passage. 2. The vacuum suction adjustable transfer roller as claimed in claim 1 , wherein the plurality of air draw-in passages is in communication with each other and the air evacuation device comprises a vacuum pump. 3. The vacuum suction adjustable transfer roller as claimed in claim 1 , wherein the roller body comprises a mounting section corresponding to each of the air draw-in passages and the piezoelectric ceramic piece has two end mounted to the mounting section, the valve having an end fixedly mounted to a middle of the piezoelectric ceramic piece and an opposite end inserted into the air draw-in passage. 4. A vacuum suction adjustable transfer roller, comprising: a roller body and a plurality of adjustment devices mounted to the roller body, the roller body comprising a plurality of air draw-in passages uniformly distributed therein, the air draw-in passages drawing in air by means of an air evacuation device, each of the adjustment devices comprising: a valve arranged in each of the air draw-in passages, a piezoelectric ceramic piece connected to the valve, and a control circuit electrically connected to the piezoelectric ceramic piece, the control circuit controlling an intensity of an electric field applied to the piezoelectric ceramic piece so that the piezoelectric ceramic piece undergoes deformation under the action of the electric field and the valve is caused by the deformation of the piezoelectric ceramic piece to selectively insert into or withdraw out of the air draw-in passage so as to control flow of air drawn in by the air draw-in passage and thus controlling a magnitude of a vacuum suction force induced by the air draw-in passage; wherein the roller body comprises an insertion slot corresponding to each of the air draw-in passages and the valve selectively insertable into and removable out of the air draw-in passage through the insertion slot to selectively close and open the air draw-in passage; and wherein the roller body comprises a mounting section corresponding to each of the air draw-in passages and the piezoelectric ceramic piece has two end mounted to the mounting section, the valve having an end fixedly mounted to a middle of the piezoelectric ceramic piece and an opposite end inserted into the air draw-in passage. 5. The vacuum suction adjustable transfer roller as claimed in claim 4 , wherein the plurality of air draw-in passages is in communication with each other and the air evacuation device comprises a vacuum pump. 6. A film attachment method, comprising the following steps: (1) holding a film-to-be-attached on a transfer roller by means of vacuum; (2) adjusting vacuum suction that the transfer roller applies to the film-to-be-attached according to a pressure bearing capacity of the film-to-attach substrate and material of the film- to-be-attached; and (3) attaching the film-to-be-attached to the film-to-attach substrate at a corresponding position; and wherein the transfer roller comprises a roller body and a plurality of adjustment devices mounted to the roller body, the roller body comprising a plurality of air draw-in passages uniformly distributed therein, the air draw-in passages drawing in air by means of an air evacuation device, each of the adjustment devices comprising: a valve arranged in each of the air draw-in passages, a piezoelectric ceramic piece connected to the valve, and a control circuit electrically connected to the piezoelectric ceramic piece, the film-to-be-attached being held on the roller body of the transfer roller by means of vacuum, the roller body comprising an insertion slot corresponding to each of the air draw-in passages and the valve selectively insertable into and removable out of the air draw-in passage through the insertion slot to selectively close and open the air draw-in passage, the roller body comprising a mounting section corresponding to each of the air draw-in passages and the piezoelectric ceramic piece has two end mounted to the mounting section, the valve having an end fixedly mounted to a middle of the piezoelectric ceramic piece and an opposite end inserted into the air draw-in passage. 7. The film attachment method as claimed in claim 6 , wherein in step (2), the control circuit controls an intensity of an electric field applied to the piezoelectric ceramic piece so that the piezoelectric ceramic piece undergoes deformation under the action of the electric field and the valve is caused by the deformation of the piezoelectric ceramic piece to selectively insert into or withdraw out of the air draw-in passage so as to control flow of air drawn in by the air draw-in passage and thus controlling a magnitude of a vacuum suction force induced by the air draw-in passage. 8. The film attachment method as claimed in claim 6 , wherein the plurality of air draw-in passages is in communication with each other and the air evacuation device comprises a vacuum pump. 9. The film attachment method as claimed in claim 6 , wherein the film-to-be-attached is a 3D film and the film-to-attach substrate is a glass substrate. 10. The film attachment method as claimed in claim 6 , wherein the pressure bearing capacity of the film-to-attach substrate is determined according to thickness of the film-to-attach substrate.
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