Three-dimensional display apparatus
US-2015346499-A1 · Dec 3, 2015 · US
US2015253580A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2015253580-A1 |
| Application number | US-201514640558-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 6, 2015 |
| Priority date | Mar 6, 2014 |
| Publication date | Sep 10, 2015 |
| Grant date | — |
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To provide a substrate laminating apparatus and a substrate laminating method capable of laminating two substrates highly precisely while achieving low cost and saving space. The substrate laminating apparatus includes an upper-substrate camera group provided to a lower vacuum chamber for capturing an image of an upper substrate fixed to an upper vacuum chamber. The upper-substrate camera group captures images of a first upper-substrate alignment mark and a second upper-substrate alignment mark of the upper substrate fixed to the upper vacuum chamber by actions synchronized with the lower vacuum chamber. Thereby, it is possible to save the space and to lower the cost by reducing the number of mechanical components.
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What is claimed is: 1 . A substrate laminating apparatus, comprising: a first vacuum chamber including a first opening; a first table provided inside the first opening of the first vacuum chamber for holding a first substrate, a second vacuum chamber including a second opening; a second table provided inside the second opening of the second vacuum chamber for holding a second substrate; a moving mechanism unit which moves the first vacuum chamber so that the first openin…
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