Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope
US-9336983-B2 · May 10, 2016 · US
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Heberlein Robert patents
Heberlein Robert is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Heberlein Robert |
| Total patents | 1 |
| First publication | May 10, 2016 |
| Latest publication | May 10, 2016 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/265 | 1 |
| H01J37/28 | 1 |
| H01J2237/2826 | 1 |
| G01Q30/02 | 1 |
| H01J2237/2583 | 1 |