Methods and systems for event modulated electron microscopy
US-2024355581-A1 · Oct 24, 2024 · US
Charged particle radiation apparatus
US9153418B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9153418-B2 |
| Application number | US-201414461051-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 15, 2014 |
| Priority date | Sep 13, 2013 |
| Publication date | Oct 6, 2015 |
| Grant date | Oct 6, 2015 |
How to read this patent
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
- Title
What the patent document calls the invention.
- Abstract
A short plain-language summary of the technical disclosure.
- Assignees and inventors
Who owns or filed the patent and who is credited as inventor.
- Key dates
Filing, priority, publication, and grant dates set the timeline.
- First independent claim
The legal scope of protection — read this for what is actually claimed.
- CPC / IPC classifications
Technology tags used to group this patent with similar filings.
- Citations and related patents
Prior art links and similar publications in this corpus.
Abstract
Official abstract text for this publication.
A charged particle radiation apparatus includes a control device that switches between a first charged particle beam and a second charged particle beam, the first charged particle beam being scanned to acquire an image and a waveform signal, the second charged particle beam being scanned over a sample before the scan of the first charged particle beam and used to charge the sample more than the first charged particle beam; wherein the control device is configured to acquire at least one of signal waveform data and image data about a pattern formed on the sample in accordance with a scan performed on the sample by the second charged particle beam, and to stop, when the acquired data has proved to be indicative of a predetermined state, the scan of the second charged particle beam.
First claim
Opening claim text (preview).
What is claimed is: 1. A charged particle radiation apparatus for acquiring signal waveform data or image data of a pattern formed on a sample in accordance with charged particles, the charged particles being obtained by scanning a charged particle beam emitted from a charged particle source, the charged particle radiation apparatus comprising: a control device that switches between a first charged particle beam and a second charged particle beam, the first charged particle beam b…
Assignees
Inventors
Classifications
Physics · mapped topic
- H01J37/265Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Patent family
Related publications grouped by family.
External sources
Next steps
Free tools are coming soon. Tell us what you want to track and we'll notify you.
Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US9153418B2 cover?
- A charged particle radiation apparatus includes a control device that switches between a first charged particle beam and a second charged particle beam, the first charged particle beam being scanned to acquire an image and a waveform signal, the second charged particle beam being scanned over a sample before the scan of the first charged particle beam and used to charge the sample more than the…
- Who is the assignee on this patent?
- Hitachi High Tech Corp
- What technology area does this patent fall under?
- Primary CPC classification H01J37/265. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Oct 06 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).