Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method

Patent metadata

Field	Value
Publication number	US-9316913-B2
Application number	US-201214238442-A
Country	US
Kind code	B2
Filing date	Aug 9, 2012
Priority date	Aug 12, 2011
Publication date	Apr 19, 2016
Grant date	Apr 19, 2016

Abstract

Material for forming an underlayer film for lithography, which has a high carbon concentration, a low oxygen concentration, a relatively high heat resistance and also a relatively high solvent solubility, and which can be applied to a wet process is disclosed. Material for forming an underlayer film for lithography contains a compound represented by general formula (1).

First claim

The invention claimed is:

1. A material for forming an underlayer film for lithography, comprising:
a compound represented by the following general formula (1)

wherein formula (1), each X independently represents an oxygen atom or a sulfur atom, each R 1 independently represents a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms, the hydrocarbon group may have a cyclic hydrocarbon group, a double bond, a hetero atom, or an aromatic group having 6 to 30 carbon atoms, and each R 2 independently represents a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or a hydroxyl group, provided that at least one R 2 represents a hydroxyl group, each m is independently an integer of 1 to 6, and n is an integer of 1 to 4; and
at least one of an acid generating agent and a crosslinking agent.

2. The material for forming an underlayer film for lithography according to claim 1 , wherein the compound represented by the general formula (1) is a compound represented by the following general formula (1a

wherein formula (1a), each X independently represents an oxygen atom or a sulfur atom, each R 1 independently represents a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms, the hydrocarbon group may have a cyclic hydrocarbon group, a double bond, a hetero atom, or an aromatic group having 6 to 30 carbon atoms, each R 4 independently represents a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or a hydroxyl group, and each m 4 is independently an integer of 0 to 5.

3. A material for forming an underlayer film for lithography, comprising a resin having a structure represented by the following general formula (2)

wherein formula (2), each X independently represents an oxygen atom or a sulfur atom, each R 1 independently represents a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms, the hydrocarbon group may have a cyclic hydrocarbon group, a double bond, a hetero atom, or an aromatic group having 6 to 30 carbon atoms, and each R 2 independently represents a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or a hydroxyl group, provided that at least one R 2 represents a hydroxyl group, each R 3 independently represents a single bond, or a linear or branched alkylene group having 1 to 20 carbon atoms, each m 2 is independently an integer of 1 to 5, and n is an integer of 1 to 4.

4. The material for forming an underlayer film for lithography according to claim 1 , further comprising an organic solvent.

5. The material for forming an underlayer film for lithography according to claim 1 , wherein said material includes an acid generating agent.

6. The material for forming an underlayer film for lithography according to claim 1 , wherein said material includes a crosslinking agent.

7. An underlayer film for lithography comprising the material for forming an underlayer film for lithography according to claim 1 .

8. A pattern forming method comprising:
forming an underlayer film on a substrate by applying the material for forming an underlayer film according to claim 1 onto the substrate;
forming at least one photoresist layer on the underlayer film;
after forming the at least one photoresist layer, irradiating a region of the photoresist layer with radiation; and
after irradiating with radiation, developing with an alkali.

9. A pattern forming method comprising:
forming an underlayer film on a substrate by applying the material for forming an underlayer film according to claim 1 onto the substrate;
forming an intermediate layer film on the underlayer film by applying a silicon atom-containing resist intermediate layer film material onto the underlayer film;
forming at least one photoresist layer on the intermediate layer film;
after forming the at least on photoresist layer, irradiating a required region of the photoresist layer with radiation;
after irradiating with radiation, developing with an alkali to form a resist pattern; and
after developing, etching the intermediate layer film while the resist pattern functions as a mask, etching the underlayer film while the obtained intermediate layer film pattern functions as an etching mask and etching the substrate while the obtained underlayer film pattern functions as an etching mask, to form a pattern on the substrate.

Assignees

• Echigo Masatoshi
• Higashihara Go
• Uchiyama Naoya
• Mitsubishi Gas Chemical Co

Inventors

• Echigo Masatoshi
• Higashihara Go
• Uchiyama Naoya

Classifications

• C07D311/96

  spiro-condensed with carbocyclic rings or ring systems · CPC title

• G03F7/091 Primary

  characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement · CPC title

• G03F7/09

  characterised by structural details, e.g. supports, auxiliary layers (supports for printing plates in general B41N) · CPC title

• G03F7/11 Primary

  having cover layers or intermediate layers, e.g. subbing layers {(G03F7/091 - G03F7/093, B41N3/03 take precedence)} · CPC title

• G03F7/40

  Treatment after imagewise removal, e.g. baking · CPC title