Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method
US-9316913-B2 · Apr 19, 2016 · US
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Uchiyama Naoya patents
Uchiyama Naoya holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Apr 2, 2015 |
| Latest publication | Apr 19, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method
US-9316913-B2 · Apr 19, 2016 · US
Phenolic resin and material for forming underlayer film for lithography
US-9110373-B2 · Aug 18, 2015 · US
Material for forming underlayer film lithography, underlayer film for lithography and pattern forming method
US-2015090691-A1 · Apr 2, 2015 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 3 |
| Physics | 3 |
| Electricity | 3 |