Processing apparatus and article manufacturing method using same

Patent metadata

Field	Value
Publication number	US-9310688-B2
Application number	US-201314045880-A
Country	US
Kind code	B2
Filing date	Oct 4, 2013
Priority date	Oct 23, 2012
Publication date	Apr 12, 2016
Grant date	Apr 12, 2016

Abstract

A processing apparatus configured to conduct a prescribed processing on an object to be processed in a specific environment, the processing apparatus comprising: a chamber configured to have an aperture and an interior accommodated to a specific environment; a mechanism of which at least a portion is contained within the chamber interior, while a remaining portion passes through the aperture without contacting the chamber; at least one support member configured to support the mechanism; a sealing member that configures a boundary of the specific environment and an atmospheric environment by connecting one end to the aperture and connecting the other end to the support member; and a rotary member configured to allow relative rotation around a vertical axis between the support member and a structure that supports the support member.

First claim

What is claimed is:

1. A processing apparatus configured to conduct a prescribed processing on an object to be processed in a specific environment, the processing apparatus comprising:
a chamber configured to have an aperture and an interior accommodated to a specific environment;
a mechanism of which at least a portion is contained within the chamber interior, while a remaining portion passes through the aperture without contacting the chamber;
at least one support member configured to support the mechanism;
a sealing member that configures a boundary of the specific environment and an atmospheric environment by connecting one end to the aperture and connecting the other end to the support member; and
a rotary member configured to allow relative rotation around a vertical axis between the support member and a structure that supports the support member.

2. The processing apparatus according to claim 1 , wherein the sealing member is an extendable pipe.

3. The processing apparatus according to claim 1 , wherein the support member has a form that restricts motion other than rotation of the rotary member relative to the structure.

4. The processing apparatus according to claim 2 , wherein the support member has a form that restricts motion other than rotation of the rotary member relative to the structure.

5. The processing apparatus according to claim 3 , wherein the support member has a tapered surface that is inclined at a fixed angle from the vertical direction.

6. The processing apparatus according to claim 4 , wherein the support member has a tapered surface that is inclined at a fixed angle from the vertical direction.

7. The processing apparatus according to claim 1 , wherein the mechanism includes a movable holding unit configured to hold the object to be processed,
wherein the structure is a member which is laid on a flooring or floor surface, and
wherein the chamber includes a surface plate that supports a processing mechanism that directly conducts the processing, and is supported by the structure with interposition of vibration-proofing mechanisms.

8. The processing apparatus according to claim 7 , wherein the support member includes a first support member as a part of the mechanism or as a portion connected to the mechanism, and a second support member configured to receive the first support member on its inner side and to connect to the other end of the sealing member, and
wherein the rotary member includes a first rotary member configured to allow relative rotation of the first support member and the second support member, and a second rotary member configured to allow relative rotation of the second support member and the structure.

9. The processing apparatus according to claim 5 , comprising a measurement unit which is disposed on a side surface of the specific environment in the surface plate, and configured to serve to measure a position of the holding unit.

10. The processing apparatus according to claim 1 , wherein the mechanism is a processing mechanism which directly conducts the processing,
wherein the structure includes a support structure which supports the processing mechanism inside the chamber, and
wherein the chamber is supported independently of the support structure.

11. The processing apparatus according to claim 10 , comprising:
a movable holding unit which holds the object to be processed; and
a measurement unit which is disposed in the support structure, and configured to measure a position of the holding unit.

12. The processing apparatus according to claim 1 , wherein the specific environment is a vacuum environment.

13. The processing apparatus according to claim 7 , wherein the specific environment is a vacuum environment, and
wherein the processing mechanism is an electron optical system configured to draw on the object to be processed using charged particle beam.

14. The processing apparatus according to claim 10 , wherein the specific environment is a vacuum environment, and
wherein the processing mechanism is an electron optical system which serves to conduct drawing on the object to be processed using charged particle beam.

15. The processing apparatus according to claim 7 , wherein the processing mechanism is a projection optical system configured to transfer an original pattern to the object to be processed.

16. The processing apparatus according to claim 10 , wherein the processing mechanism is a projection optical system configured to transfer an original pattern to the object to be processed.

17. An article manufacturing method comprising:
processing en an object to be processed using a processing apparatus; and
developing the object to be processed that has been processed;
wherein the processing apparatus is configured to conduct a prescribed processing on an object to be processed in a specific environment, the processing apparatus comprising:
a chamber configured to have an aperture and an interior accommodated to a specific environment;
a mechanism of which at least a portion is contained within the chamber interior, while a remaining portion passes through the aperture without contacting the chamber;
at least one support member configured to support the mechanism;
a sealing member that configures a boundary of the specific environment and an atmospheric environment by connecting one end to the aperture and connecting the other end to the support member; and
a rotary member configured to allow relative rotation around a vertical axis between the support member and a structure that supports the support member.

Assignees

• Canon Kk

Inventors

• Iwase Daisuke
• Korenaga Nobushige

Classifications

• G03F7/70841 Primary

  Constructional issues related to vacuum environment, e.g. load-lock chamber · CPC title

• B23Q3/02

  for mounting on a work-table, tool-slide, or analogous part (B23Q3/15 takes precedence) · CPC title

• G03F7/709

  Vibration, e.g. vibration detection, compensation, suppression or isolation · CPC title

• G21K5/08

  Holders for targets or for other objects to be irradiated · CPC title

• G03F7/26 Primary

  Processing photosensitive materials; Apparatus therefor (G03F7/12 - G03F7/24 take precedence) · CPC title