Lithography apparatus, stage apparatus, and method of manufacturing articles

Patent metadata

Field	Value
Publication number	US-9823587-B2
Application number	US-201514671898-A
Country	US
Kind code	B2
Filing date	Mar 27, 2015
Priority date	Mar 31, 2014
Publication date	Nov 21, 2017
Grant date	Nov 21, 2017

Abstract

This disclosure provides a lithography apparatus including: a lens barrel having an optical system configured to irradiate a substrate with a beam; and a stage apparatus configured to repeat a long distance movement in a primary scanning direction of the substrate and a short distance movement which is shorter than the long distance movement in terms of the amount of movement in a secondary scanning direction of the substrate, and being configured to form a pattern on the substrate with the beam, wherein the stage apparatus includes: a first moving body configured to move in the primary scanning direction; a floating unit configured to support the first moving body, so as to float by a magnetic force and be movable in the primary scanning direction; a second moving body configured to move in the secondary scanning direction; and a guide using a rolling body configured to support the second moving body in contact therewith so as to be movable in the secondary scanning direction.

First claim

What is claimed is:

1. A lithography apparatus for forming a pattern on a substrate comprising:
a barrel having an optical system configured to irradiate the substrate; and
a stage apparatus configured to move the substrate in a first direction and a second direction across the first direction,
wherein the stage apparatus includes:
a first moving body configured to move in the first direction;
a second moving body configured to move in the second direction;
a floating unit configured to support the first moving body, so as to float by a magnetic force above the second moving body and be movable in the first direction;
a guide using a rolling body configured to support the second moving body in contact with the base and the second moving body so as to be movable in the second direction; and
a control unit configured to control positions of the first moving body and the second moving body,
wherein the control unit is configured to control first movement, in the first direction, of the first moving body supported by the floating unit while the substrate is irradiated and is configured to control second movement, in the second direction, of the second moving body supported by the guide while the substrate is not irradiated after the first movement,
wherein the first movement and the second movement are repeatedly performed,
wherein one movement amount of the first movement is larger than one movement amount of the second movement.

2. The lithography apparatus according to claim 1 , further comprising a vacuum chamber,
wherein the stage apparatus is configured to move the substrate within the vacuum chamber.

3. The lithography apparatus according to claim 1 , further comprising a control unit configured to control the movement of the stage apparatus,
wherein the control unit controls a maximum speed of the first moving body in the first movement so that the maximum speed is not lower than a speed of 1000 mm/s.

4. The lithography apparatus according to claim 1 , further comprising a control unit configured to control the movement of the stage apparatus,
wherein the control unit controls a maximum speed of the second moving body in the second movement so that the maximum speed is not higher than a speed of 5 mm/s.

5. The lithography apparatus according to claim 1 , wherein the floating unit includes a permanent magnet provided on the first movable body and a magnetic member provided so as to be fixed to a lower portion of the first movable body.

6. The lithography apparatus according to claim 1 , comprising a plurality of the barrels.

7. A method of manufacturing articles comprising:
irradiating a substrate with a beam by using a lithography apparatus; and
applying at least one of etching and ion injection to the substrate, wherein the lithography apparatus includes:
a barrel having an optical system configured to irradiate the substrate; and

a stage apparatus configured to move the substrate in a first direction and a second direction across the first direction,
wherein the stage apparatus includes:
a first moving body configured to move in the first direction;
a second moving body configured to move in the second direction;
a floating unit configured to support the first moving body, so as to float by a magnetic force above the second moving body and be movable in the first direction; and
a guide using a rolling body configured to support the second moving body in contact with the base and the second moving body so as to be movable in the second direction,
a control unit configured to control positions of the first moving body and the second moving body,
wherein the control unit is configured to control first movement, in the first direction, of the first moving body supported by the floating unit while the substrate is irradiated and is configured to control second movement, in the second direction, of the second moving body supported by the guide while the substrate is not irradiated after the first movement,
wherein the first movement and the second movement are repeatedly performed,
wherein one movement amount of the first movement is larger than one movement amount of the second movement.

8. A lithography apparatus for forming a pattern on a substrate comprising:
a barrel having an optical system configured to irradiate the substrate; and
a stage apparatus configured to move the substrate in a first direction and a second direction across the first direction,
wherein the stage apparatus includes:
a first moving body configured to move in the first direction;
a second moving body configured to move in the second direction;
a floating unit configured to support the first moving body, so as to float by a magnetic force above the second moving body and be movable in the first direction; and
a guide using a rolling body configured to support the second moving body in contact with the base and the second moving body so as to be movable in the second direction,
a control unit configured to control positions of the first moving body and the second moving body,
wherein the control unit is configured to control first movement, in the first direction, of the first moving body supported by the floating unit while the substrate is irradiated and is configured to control second movement, in the second direction, of the second moving body supported by the guide while the substrate is not irradiated after the first movement,
wherein the first movement and the second movement are repeatedly performed,
wherein maximum speed of the first moving body in the first movement is larger than maximum speed of the second moving body in the second movement.

9. A method of manufacturing articles comprising:
irradiating a substrate by using a lithography apparatus; and
applying at least one of etching and ion injection to the substrate,
wherein the lithography apparatus includes:
a barrel having an optical system configured to irradiate the substrate; and
a stage apparatus configured to move the substrate in a first direction and a second direction across the first direction,

wherein the stage apparatus includes:
a first moving body configured to move in the first direction;
a second moving body configured to move in the second direction;
a floating unit configured to support the first moving body, so as to float by a magnetic force above the second moving body and be movable in the first direction; and
a guide using a rolling body configured to support the second moving body in contact with the base and the second moving body so as to be movable in the second direction,
a control unit configured to control positions of the first moving body and the second moving body,
wherein the control unit is configured to control first movement, in the first direction, of the first moving body supported by the floating unit while the substrate is irradiated and is configured to control second movement, in the second direction, of the second moving body supported by the guide while the substrate is not irradiated after the first movement,

wherein the first movement and the second movement are repeatedly performed,
wherein maximum speed of the first moving body in the first movement is larger than maximum speed of the second moving body in the second movement.

Assignees

• Canon Kk

Inventors

• Kimura Tadashi
• Korenaga Nobushige

Classifications

• G03F7/70775

  Position control, e.g. interferometers or encoders for determining the stage position · CPC title

• G03F7/70841

  Constructional issues related to vacuum environment, e.g. load-lock chamber · CPC title

• G03F7/70716 Primary

  Stages · CPC title

• G03F7/70816

  Bearings · CPC title

• G03F7/70725

  control · CPC title