Plasma processing apparatus
US-2024170265-A1 · May 23, 2024 · US
US9308546B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9308546-B2 |
| Application number | US-201213824867-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 5, 2012 |
| Priority date | Jun 5, 2012 |
| Publication date | Apr 12, 2016 |
| Grant date | Apr 12, 2016 |
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A discharge surface treatment apparatus generates a pulsed discharge between poles, that is, between a discharge electrode and a workpiece, and the discharge electrode is obtained by compression-molding of any one of a metal powder, a powder of a metal compound, and a powder of ceramics or a mixture thereof. The apparatus forms a film made of an electrode material or the like on a workpiece surface by thermal energy due to the discharge. The apparatus includes: a capacitor that is connected to any one of the discharge electrode and the workpiece at one end; and a parallel circuit of a resistor and a diode, which is provided between another one of the discharge electrode and the workpiece and another end of the capacitor via a connection line.
Opening claim text (preview).
The invention claimed is: 1. A discharge surface treatment apparatus that: generates a pulsed discharge between poles comprising a discharge electrode and a workpiece, wherein the discharge electrode is obtained by compression-molding of any one of a metal powder, a powder of a metal compound, and a powder of ceramics or a mixture thereof; and forms a film made of an electrode material on a workpiece surface by thermal energy due to the discharge, the apparatus comprising: a capacitor that is connected to any one of the discharge electrode and the workpiece at one end; a switching element connected between a power supply and the workpiece; a controller configured to turn on the switching element to apply a voltage between the poles and charge the capacitor with a power supplied from the power supply; and a parallel circuit of a resistor and a diode, which is provided between another one of the discharge electrode and the workpiece and another end of the capacitor via a connection line, wherein the capacitor is configured to generate a leading pulse current having a high peak value and a short pulse width; and the resistor is configured to suppress, and the diode is configured to block, a reverse current occurred in the capacitor from flowing toward the poles, when a subsequent current having a low current value and a long pulse width starts flowing between the poles. 2. The discharge surface treatment apparatus according to claim 1 , wherein the capacitor is a variable capacitor. 3. The discharge surface treatment apparatus according to claim 2 , wherein the variable capacitor includes: a series circuit comprised of a capacitor group, in which a plurality of capacitors is arranged in parallel, and a switch group, in which switches are arranged in parallel, wherein a number of the switches is a same as a number of the plurality of capacitors. 4. The discharge surface treatment apparatus according to claim 1 , wherein the controller is configured to control the switching element to stay on while the leading pulse current flows between the poles due to the power being supplied by the charged capacitor and while the subsequent current flows between the poles in response to the power of the capacitor being discharged. 5. A discharge surface treatment apparatus that: generates a pulsed discharge between poles comprising a discharge electrode and a workpiece, wherein the discharge electrode is obtained by compression-molding of any one of a metal powder, a powder of a metal compound, and a powder of ceramics or a mixture thereof; and forms a film made of an electrode material on a workpiece surface by thermal energy due to the discharge, the apparatus comprising: a capacitor that is connected to any one of the discharge electrode and the workpiece at one end; a switching element provided between another one of the discharge electrode and the workpiece and another end of the capacitor via a connection line; and a controller that keeps the switching element on until a lapse of a predetermined time after occurrence of a discharge from when a voltage is applied between the poles, keeps the switching element off for an arbitrary period of time, and thereafter, keeps the switching element on for a period until voltage application between the poles ends, wherein the capacitor is configured to generate a leading pulse current having a high peak value and a short pulse width; and the switching element is configured to block a flow of a reverse current occurred in the capacitor from flowing toward the poles when a subsequent current having a low current value and a long pulse width starts flowing between the poles. 6. The discharge surface treatment apparatus according to claim 5 , wherein the capacitor is a variable capacitor. 7. The discharge surface treatment apparatus according to claim 6 , wherein the variable capacitor includes: a series circuit comprised of a capacitor group, in which a plurality of capacitors is arranged in parallel, and a switch group, in which switches are arranged in parallel, wherein a number of the switches is a same as a number of the plurality of capacitors. 8. The discharge surface treatment apparatus according to claim 5 , wherein the controller is configured to turn on the switching element to charge the capacitor with the power supplied from the power supply, control the switching element to stay on while the leading pulse current flows between the poles due to the power being supplied by the charged capacitor, and turn off the switching element for the arbitrary period of time just before the subsequent current starts flowing between the poles in response to the power of the capacitor being discharged thereby blocking the reverse current from flowing toward the poles.
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