Ductile mode drilling methods for brittle components of plasma processing apparatuses

Patent metadata

Field	Value
Publication number	US-9314854-B2
Application number	US-201313754068-A
Country	US
Kind code	B2
Filing date	Jan 30, 2013
Priority date	Jan 30, 2013
Publication date	Apr 19, 2016
Grant date	Apr 19, 2016

Abstract

A method of drilling holes comprises ductile mode drilling the holes in a component of a plasma processing apparatus with a cutting tool wherein the component is made of a nonmetallic hard and brittle material. The method comprises drilling each hole in the component by controlling a depth of cut while drilling such that a portion of the brittle material undergoes high pressure phase transformation and forms amorphous portions of the brittle material during chip formation. The amorphous portions of the brittle material are removed from each hole such that a wall of each hole formed in the component has an as drilled surface roughness (Ra) of about 0.2 to 0.8 μm.

First claim

What is claimed is:

1. A method of ductile mode drilling holes in a component of a plasma processing apparatus with a cutting tool wherein the component is made of a nonmetallic hard and brittle material comprising:
drilling each hole in the component by controlling a depth of cut while drilling such that a portion of the brittle material undergoes high pressure phase transformation and forms amorphous portions of the brittle material during chip formation; and
removing amorphous portions of the brittle material from each hole such that a wall of each hole formed in the component has an as drilled surface roughness (Ra) of about 0.2 to 0.8 μm;
wherein the component is a silicon or silicon carbide showerhead electrode.

2. The method of claim 1 , wherein the hard and brittle material is silicon.

3. The method of claim 1 , further comprising cleaning the component with the ductile mode drilled holes with an acidic solution.

4. The method of claim 1 , wherein (a) each hole has a diameter of about 0.2 to 15 mm; or (b) each hole has a diameter of about 0.2 to 0.7 mm.

5. The method of claim 1 , wherein each hole has a depth of about 5 to 15 mm.

6. The method of claim 1 , wherein the component is a showerhead electrode of a plasma etching chamber.

7. The method of claim 1 , wherein the cutting tool is diamond drill.

8. The method of claim 1 , wherein (a) subsurface damage of each hole extends less than about 20 μm into the wall of the hole; (b) subsurface damage of each hole extends less than about 10 μm into the wall of the hole; or (c) subsurface damage of each hole extends less than about 5 μm into the wall of the hole.

9. The method of claim 1 , wherein the as drilled surface roughness of the wall of each hole is between about 0.4 to 0.6 μm.

10. The method of claim 1 , wherein deionized water is supplied to the hole during ductile mode drilling.

11. A method of replacing a component of a plasma processing apparatus comprising: removing a used showerhead electrode from the plasma processing apparatus when the used showerhead electrode is eroded; and replacing the used with a showerhead electrode made by the method of claim 1 .

12. A method of installing a showerhead electrode in a plasma etching chamber comprising installing the showerhead electrode made by the method of claim 1 in a plasma etching chamber.

13. A method of etching a semiconductor substrate in a plasma processing apparatus, comprising: installing a showerhead electrode made according to the method of claim 1 in a plasma chamber of a plasma processing apparatus; and plasma etching at least one semiconductor substrate in the plasma chamber.

14. The method of claim 1 , further comprising subjecting the cutting tool to intermittent ultrasonic cleaning before drilling a new hole in the component while ductile mode drilling the component of a hard and brittle material.

15. The method of claim 14 , wherein the cutting tool undergoes ultrasonic cleaning after drilling each hole.

16. The method of claim 14 , wherein the cutting tool undergoes a comprehensive cleaning process after ductile mode drilling each component, the comprehensive cleaning process comprising removing the cutting tool, cleaning the cutting tool with a caustic soap, and replacing the cutting tool.

17. A method of ductile mode drilling holes in a component of a plasma processing apparatus with a cutting tool wherein the component is made of a nonmetallic hard and brittle material comprising:
drilling each hole in the component by controlling a depth of cut while drilling such that a portion of the brittle material undergoes high pressure phase transformation and forms amorphous portions of the brittle material during chip formation; and
removing amorphous portions of the brittle material from each hole such that a wall of each hole formed in the component has an as drilled surface roughness (Ra) of about 0.2 to 0.8 μm; wherein the ductile mode drilling is performed with a drill speed of about 20,000 to 60,000 revolutions per minute, a feed rate at about 0.5 to 1.5 inches per minute, a peck depth of about 0.001 to 0.004 inch, and a depth of cut less than about 450 nanometers per revolution.

18. The method of claim 17 , wherein the depth of cut is about 200 to 400 nanometers per revolution.

19. The method of claim 17 , wherein the ductile mode drilling is performed with a drill speed of about 35,000 to 55,000 revolutions per minute.

Assignees

• Lam Res Corp

Inventors

• Huang Lihua Li
• Scott Duane D
• Doench Joseph P
• Burns Jamie
• Stenta Emily P
• Bettencourt Gregory R
• Daugherty John E

Classifications

• Y10T408/04

  Bit detachable · CPC title

• Y10T408/03

  Processes · CPC title

• Y10T29/49826

  Assembling or joining · CPC title

• Y10T29/4973

  Replacing of defective part · CPC title

• B28D5/021

  by drilling · CPC title