Systems and methods for internal surface conditioning in plasma processing equipment

Patent metadata

Field	Value
Publication number	US-9355922-B2
Application number	US-201414514213-A
Country	US
Kind code	B2
Filing date	Oct 14, 2014
Priority date	Oct 14, 2014
Publication date	May 31, 2016
Grant date	May 31, 2016

Abstract

A method of conditioning internal surfaces of a plasma source includes flowing first source gases into a plasma generation cavity of the plasma source that is enclosed at least in part by the internal surfaces. Upon transmitting power into the plasma generation cavity, the first source gases ignite to form a first plasma, producing first plasma products, portions of which adhere to the internal surfaces. The method further includes flowing the first plasma products out of the plasma generation cavity toward a process chamber where a workpiece is processed by the first plasma products, flowing second source gases into the plasma generation cavity. Upon transmitting power into the plasma generation cavity, the second source gases ignite to form a second plasma, producing second plasma products that at least partially remove the portions of the first plasma products from the internal surfaces.

First claim

We claim:

1. A method of conditioning one or more internal surfaces of a plasma source, comprising:
flowing one or more first source gases into a plasma generation cavity of the plasma source, the plasma generation cavity being enclosed at least in part by the one or more internal surfaces, wherein:
the one or more internal surfaces are substantially planar, perforated surfaces that face one another across the plasma generation cavity,
the plasma generation cavity is bounded by the substantially planar, perforated surfaces and an insulator comprising a ceramic ring that is disposed against a periphery of each of the substantially planar, perforated surfaces, the ceramic ring forming an optical port, and
flowing the one or more first source gases comprises flowing the first source gases through perforations in an upstream one of the internal surfaces;

transmitting power into the plasma generation cavity by utilizing the internal surfaces as electrodes across which radio frequency (RF) power is connected, to generate a first plasma, wherein:
the one or more first source gases ignite to form the first plasma, producing first plasma products, and
portions of the first plasma products adhere to the one or more internal surfaces;

flowing the first plasma products out of the plasma generation cavity by flowing the plasma products through perforations in a downstream one of the internal surfaces, toward a process chamber where a workpiece is processed by the first plasma products;
flowing one or more second source gases into the plasma generation cavity;
transmitting power into the plasma generation cavity to generate a second plasma, wherein
the one or more second source gases ignite to form the second plasma, producing second plasma products; and
the second plasma products at least partially remove the portions of the first plasma products from the one or more internal surfaces;

capturing optical emissions from at least one of the first plasma and the second plasma through the optical port as an optical signal in a fiber optic;
delivering the optical signal through the fiber optic to an optical emission spectrometer; and
identifying emission peaks with the optical emission spectrometer to monitor the conditioning of the internal surfaces.

2. The method of claim 1 , further comprising:
performing sequential repetitions of the steps of flowing the one or more first source gases, transmitting the power into the plasma generation cavity to generate the first plasma, flowing the one or more second source gases, and transmitting the power into the plasma generation cavity to generate the second plasma; and
adjusting a parameter of the second plasma based on the emission peaks, to improve consistency of the first plasma on the next repetition.

3. The method of claim 2 , wherein adjusting the parameter of the second plasma comprises adjusting one or more of
a power level transmitted into the plasma generation cavity;
concentration of one or more of the second source gases;
a pressure of the second plasma; and
time during which the power is transmitted into the plasma generation cavity to generate the second plasma.

4. The method of claim 1 , wherein:
the one or more internal surfaces comprise yttria;
the workpiece comprises silicon;
the workpiece is processed by the first plasma products etching the silicon;
flowing the one or more first source gases comprises flowing at least NF 3 and H 2 as the first source gases;
the portion of the plasma products that adhere to the one or more internal surfaces include H radicals that adhere to the yttria;
flowing the one or more second source gases comprises flowing at least a fluorine-containing gas as the second source gas; and
the second plasma products include F radicals that remove at least some of the H radicals from the yttria.

5. The method of claim 4 , wherein the workpiece is a semiconductor wafer, and further comprising:
loading the wafer into the process chamber before flowing the first source gases; and
unloading the wafer from the process chamber before flowing the second source gases.

6. The method of claim 1 , wherein:
the one or more internal surfaces comprise yttria;
the workpiece comprises silicon nitride;
the workpiece is processed by the first plasma products etching the silicon nitride;
flowing the one or more first source gases comprises flowing at least NF 3 as the first source gas;
the portion of the plasma products that adhere to the one or more internal surfaces include F radicals that adhere to the yttria;
flowing the one or more second source gases comprises flowing at least a hydrogen-containing gas as the second source gas; and
the second plasma products include H radicals that remove at least some of the F radicals from the yttria.

7. The method of claim 6 , wherein the workpiece is a semiconductor wafer, and further comprising:
loading the wafer into the process chamber before flowing the first source gases; and
unloading the wafer from the process chamber before flowing the second source gases.

8. The method of claim 6 , wherein the workpiece is a semiconductor wafer, and further comprising:
loading the wafer into the process chamber before flowing the first source gases; and
flowing the second source gases and transmitting the power into the plasma generation cavity to generate the second plasma before unloading the wafer from the process chamber.

9. A method of maintaining stability of a process attribute of a plasma processing system that etches material from wafers, comprising:
generating an etch plasma from first source gases within a plasma generation cavity of the plasma processing system to create etch plasma products, wherein:
one or more internal surfaces of the plasma generation cavity are substantially planar, perforated surfaces that face one another across the plasma generation cavity,
the plasma generation cavity being:
upstream from a process chamber that processes the wafers and
bounded by the substantially planar, perforated surfaces and an insulator comprising a ceramic ring that is disposed against a periphery of each of the substantially planar, perforated surfaces, the ceramic ring forming an optical port therein,

and wherein:
generating the etch plasma comprises flowing the first source gases through perforations in an upstream one of the planar, perforated surfaces and transmitting power into the plasma generation cavity by connecting radio frequency (RF) power across the planar, perforated surfaces; and
a first portion of the etch plasma products adheres to the one or more internal surfaces of the plasma processing system;

flowing at least a second portion of the etch plasma products through a downstream one of the planar, perforated surfaces to the process chamber,
using the second portion of the etch plasma products to etch the material from one of the wafers, wherein the portions of the etch plasma products adhered to the one or more internal surfaces affect the process attribute;
generating a conditioning plasma from second source gases within the plasma generation cavity of the plasma processing system to create conditioning plasma products, wherein the conditioning plasma products remove at least some of the etch plasma products adhered to the one or more internal surfaces;
capturing an optical signal through the optical port, the optical signal being representative of an amount of the etch plasma products adhered to the one or more internal surfaces, from one of the etch plasma and the conditioning plasma;
delivering the optical signal through a fiber optic to an optical emission spectrometer, and
identifying emission peaks in the optical signal with the opti

Assignees

• Applied Materials Inc

Inventors

• Park Soonam
• Zhu Yufei
• Suarez Edwin C
• Ingle Nitin K
• Lubomirsky Dmitry
• Huang Jiayin

Classifications

• H10P74/238

  comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0421

  for drying etching · CPC title

• H10P50/283

  by chemical means · CPC title

• H10P50/268

  of silicon-containing layers · CPC title