Coating film forming apparatus

Patent metadata

Field	Value
Publication number	US-9296010-B2
Application number	US-201414458408-A
Country	US
Kind code	B2
Filing date	Aug 13, 2014
Priority date	Aug 30, 2013
Publication date	Mar 29, 2016
Grant date	Mar 29, 2016

Abstract

A coating film forming apparatus includes: a coating nozzle; a horizontal moving mechanism that relatively moves a substrate and the coating nozzle; a pressure regulating mechanism that regulates a pressure inside the coating nozzle; and a controller that changes an amount of the coating solution to be supplied from the coating nozzle, wherein the coating nozzle includes: a discharge port that is formed long in a direction perpendicular to a direction of the relative movement with respect to the substrate; and a storage chamber that communicates with the discharge port and stores the coating solution therein, and wherein while the coating solution is applied to the substrate, the pressure regulating mechanism is controlled according to a change in width of the substrate, to regulate the pressure inside the storage chamber to thereby change a discharge amount per unit time of the coating solution to be discharged.

First claim

What is claimed is:

1. A coating film forming apparatus for forming a coating film on a substrate, comprising:
a coating nozzle that supplies a coating solution toward the substrate;
a horizontal moving mechanism unit that relatively moves the substrate and the coating nozzle in a horizontal direction;
a pressure regulating mechanism unit that regulates a pressure inside the coating nozzle; and
a control unit that performs control to change an amount of the coating solution to be supplied from the coating nozzle toward the substrate,
wherein the substrate forms a shape changing in width in a direction perpendicular to a direction of the relative movement,
wherein the coating nozzle comprises:
a discharge port that is formed long in a direction perpendicular to the direction of the relative movement with respect to the substrate and discharges the coating solution toward the substrate; and
a storage chamber that communicates with the discharge port and stores the coating solution therein,

wherein the pressure regulating mechanism unit regulates a pressure of a space inside the storage chamber, and
wherein the control unit controls, while the coating solution is applied to the substrate, the pressure regulating mechanism unit, according to a discharge width of the coating solution to be discharged from the discharge port changing responding to a change in width of the substrate, to regulate the pressure inside the storage chamber to thereby change a discharge amount per unit time of the coating solution to be discharged from the discharge port,
further comprising:
a position detection means that detects relative positions of the coating nozzle and the substrate,
wherein the control unit comprises:
a substrate shape information storage unit that stores shape information on the substrate;
an arithmetic processing unit that calculates the discharge width and the discharge amount of the coating solution on a basis of the shape information on the substrate stored in the substrate shape information storage unit and information on the relative position of the substrate detected by the position detection means; and
a pressure control unit that controls the pressure regulating mechanism unit on a basis of the discharge width and the discharge amount of the coating solution calculated by the arithmetic processing unit.

2. The coating film forming apparatus according to claim 1 ,
wherein the control unit is configured to control the pressure regulating mechanism unit to gradually increase the pressure inside the storage chamber in a process of the discharge width of the coating solution increasing, and gradually decrease the pressure inside the storage chamber in a process of the discharge width of the coating solution decreasing.

3. The coating film forming apparatus according to claim 1 ,
wherein the substrate is circular, and
wherein the control unit is configured to control the pressure regulating mechanism unit to gradually increase the pressure inside the storage chamber until the discharge width of the coating solution reaches a diameter of the substrate, and gradually decrease the pressure inside the storage chamber after the discharge width of the coating solution reaches the diameter of the substrate.

4. The coating film forming apparatus according to claim 1 ,
wherein the control unit is configured to control, while the coating solution is applied to the substrate, the pressure regulating mechanism unit to keep the pressure inside the storage chamber at a negative pressure with respect to a pressure outside the storage chamber.

5. The coating film forming apparatus according to claim 1 ,
wherein the substrate is circular, and
wherein assuming that a time point when the pressure control unit sends a control signal is T 0 and a time point when the discharge amount actually changes from the time point T 0 is T 1 , there is a time lag T that is a difference between the time points T 0 and T 1 , and when the coating nozzle and the substrate are relatively moved at a constant speed V and a position PL 1 of the discharge port at the time point T 1 with respect to a position P 0 of the discharge port at the time point TO is PL 1 =(V ×T) +PL 0 , a set pressure value inside the storage chamber is calculated based on a following expression A,
set pressure value = P max+( LPL 1− L max)× g   ( A )

where Lmax represents a maximum discharge width [mm], LPL 1 represents a discharge width [mm] at the position PL 1 , Pmax represents a pressure reduction degree [Pa] at the maximum discharge width Lmax, g represents a correction pressure reduction degree coefficient of the difference between the discharge width LPL 1 at the position PL 1 and the maximum discharge width Lmax.

Assignees

• Tokyo Electron Ltd

Inventors

• Watanabe Shinjiro
• Nakamura Michikazu

Classifications

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• B05C5/0208 Primary

  for applying liquid or other fluent material to separate articles (B05C5/0204 takes precedence) · CPC title

• B05C11/1021 Primary

  responsive to presence or shape of target (B05C11/1018 takes precedence) · CPC title

• H01L21/6715

  Electricity · mapped topic

• B05C5/0225

  characterised by flow controlling means, e.g. valves, located proximate the outlet (B05C5/0258, B05C5/0275 take precedence; supply valves upstream the coating head B05C11/1036) · CPC title