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Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor

US9268242B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9268242-B2
Application numberUS-86956010-A
CountryUS
Kind codeB2
Filing dateAug 26, 2010
Priority dateAug 13, 2004
Publication dateFeb 23, 2016
Grant dateFeb 23, 2016

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A lithographic apparatus is described having a liquid supply system configured to at least partly fill a space between a projection system of the lithographic apparatus and a substrate with liquid, a barrier member arranged to substantially contain the liquid within the space, and a heater.

First claim

Opening claim text (preview).

The invention claimed is: 1. A lithographic apparatus, comprising: a substrate table constructed to hold a substrate; a projection system configured to project a patterned radiation beam onto a target portion of the substrate; a liquid supply system configured to at least partly fill a space between the projection system and the substrate with liquid; a substrate temperature conditioning system configured to provide heat transfer to or from at least a portion of the substrat…

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Frequently asked questions

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What does patent US9268242B2 cover?
A lithographic apparatus is described having a liquid supply system configured to at least partly fill a space between a projection system of the lithographic apparatus and a substrate with liquid, a barrier member arranged to substantially contain the liquid within the space, and a heater.
Who is the assignee on this patent?
Cadee Theodorus Petrus Maria, Jacobs Johannes Henricus Wilhelmus, Kate Nicolaas Ten, and 24 more
What technology area does this patent fall under?
Primary CPC classification G03F7/70808. Mapped technology areas include Physics.
When was this patent published?
Publication date Tue Feb 23 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).