Manufacturing method for photomask, and photomask
US-2024427229-A1 · Dec 26, 2024 · US
Apparatus for fabricating blank mask and method of fabricating the same
US2024248390A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2024248390-A1 |
| Application number | US-202418412610-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jan 15, 2024 |
| Priority date | Jan 19, 2023 |
| Publication date | Jul 25, 2024 |
| Grant date | — |
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Abstract
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Disclosed is an apparatus for fabricating a blank mask, the apparatus including: a chamber; and a rotatable chuck placed inside the chamber, wherein the rotatable chuck includes: a support part configured to support an optical substrate placed on the support part; a guide part disposed on a side of the optical substrate and connected to the support part; and an air pump for spraying compressed air to a space between a side surface of the optical substrate and the guide part.
First claim
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What is claimed is: 1 . An apparatus for fabricating a blank mask, the apparatus comprising: a chamber; and a rotatable chuck placed inside the chamber, wherein the rotatable chuck comprises: a support part configured to support an optical substrate placed on the support part; a guide part disposed on a side of the optical substrate and connected to the support part; and an air pump for spraying compressed air to a space between a side surface of the optical substrate…
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- What does patent US2024248390A1 cover?
- Disclosed is an apparatus for fabricating a blank mask, the apparatus including: a chamber; and a rotatable chuck placed inside the chamber, wherein the rotatable chuck includes: a support part configured to support an optical substrate placed on the support part; a guide part disposed on a side of the optical substrate and connected to the support part; and an air pump for spraying compressed …
- Who is the assignee on this patent?
- Sk Enpulse Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification G03F1/26. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Thu Jul 25 2024 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).