High temperature biasable heater with advanced far edge electrode, electrostatic chuck, and embedded ground electrode
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Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing
US9202736B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9202736-B2 |
| Application number | US-88834107-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 31, 2007 |
| Priority date | Jul 31, 2007 |
| Publication date | Dec 1, 2015 |
| Grant date | Dec 1, 2015 |
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- Title
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Abstract
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A method for refurbishing at least a portion of an electrostatic chuck. The method comprises removing a first dielectric component from a fluid distribution element of the electrostatic chuck and replacing the first dielectric component with a second dielectric component.
First claim
Opening claim text (preview).
What is claimed is: 1. A method for refurbishing at least a portion of an electrostatic chuck having a plate and a first dielectric component, wherein the first dielectric component comprises a tube inserted into the plate and the plate is adapted to be positioned within a channel to define a plenum, wherein the first dielectric component provides at least a portion of a fluid passage coupled to the plenum and a porous dielectric layer formed upon the dielectric component covers an…
Assignees
Inventors
Classifications
- H10P72/722Primary
Electricity · mapped topic
Electricity · mapped topic
Operations & Transport · mapped topic
- H01L21/6833Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9202736B2 cover?
- A method for refurbishing at least a portion of an electrostatic chuck. The method comprises removing a first dielectric component from a fluid distribution element of the electrostatic chuck and replacing the first dielectric component with a second dielectric component.
- Who is the assignee on this patent?
- Narendrnath Kadthala Ramaya, Lubomirsky Dmitry, Chen Xinglong, and 4 more
- What technology area does this patent fall under?
- Primary CPC classification H10P72/722. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Dec 01 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).