Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
Heat treatment apparatus
US9105672B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105672-B2 |
| Application number | US-201213561373-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 30, 2012 |
| Priority date | Aug 4, 2011 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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Abstract
Official abstract text for this publication.
A heat treatment apparatus for performing heat treatment of processing objects at a time without changing the interior configuration of a conventional clean room even when the processing objects are large-sized. The heat treatment apparatus is installed in a clean room. The heat treatment apparatus includes: a heat treatment furnace including a vertical processing chamber having a furnace opening at the top and adapted to house and heat-treat processing objects, a heat insulator that surrounds the circumference of the processing chamber, and a heater provided on the inner peripheral surface of the heat insulator; a lid for closing the furnace opening of the processing chamber; and a holding tool, hung via a heat-retaining cylinder from the lid, for holding the processing objects in multiple stages. The heat treatment furnace of the heat treatment apparatus, for the most part in the height direction, lies beneath the floor of the clean room.
First claim
Opening claim text (preview).
What is claimed is: 1. A heat treatment apparatus, installed in a clean room having a floor, comprising: a heat treatment furnace including a vertical processing chamber having a furnace opening at the top and adapted to house and heat-treat a plurality of processing objects, a heat insulator that surrounds the circumference of the processing chamber, and a heater provided on the inner peripheral surface of the heat insulator; a lid for closing the furnace opening of the process…
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Classifications
Electricity · mapped topic
Electricity · mapped topic
- H10P72/0434Primary
Electricity · mapped topic
Mechanical Engineering · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9105672B2 cover?
- A heat treatment apparatus for performing heat treatment of processing objects at a time without changing the interior configuration of a conventional clean room even when the processing objects are large-sized. The heat treatment apparatus is installed in a clean room. The heat treatment apparatus includes: a heat treatment furnace including a vertical processing chamber having a furnace openi…
- Who is the assignee on this patent?
- Matsuura Hiroyuki, Tokyo Electron Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0434. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).