Chemical-liquid mixing method and chemical-liquid mixing apparatus

Patent metadata

Field	Value
Publication number	US-9099502-B2
Application number	US-88240207-A
Country	US
Kind code	B2
Filing date	Aug 1, 2007
Priority date	Aug 3, 2006
Publication date	Aug 4, 2015
Grant date	Aug 4, 2015

Abstract

The present invention provides a chemical-liquid mixing method and a chemical-liquid mixing apparatus capable of sufficiently generating a peroxomonosulfuric acid that is effective in removing a resist from a substrate, when a sulfuric acid and a hydrogen peroxide solution are mixed with each other. At first, an inner tank 10 is filled up with a sulfuric acid and the sulfuric acid overflowing from the inner tank 10 is allowed to flow into an outer tank 12 . Then, a hydrogen peroxide solution is supplied into the inner tank 10 and the hydrogen peroxide solution is allowed to flow into the outer tank 12 whereby the two kinds of liquids of the hydrogen peroxide solution and the sulfuric acid are stored in the outer tank 12 . Simultaneously when the hydrogen peroxide solution flows into the outer tank 12 , a return pump 16 is activated.

First claim

The invention claimed is:

1. A chemical-liquid mixing method for mixing a sulfuric acid and a hydrogen peroxide solution, the method comprising the steps of:
A) utilizing respectively an inner tank that accommodates a substrate; an outer tank disposed around the inner tank, into which outer tank a liquid overflowing from the inner tank flows; a return pipe configured to return the liquid in the outer tank to the inner tank; and a return pump provided on the return pipe for sending the liquid in the outer tank to the inner tank;
B) supplying a sulfuric acid into the inner tank for filling the inner tank with the sulfuric acid, and allowing the sulfuric acid overflowing from the inner tank to flow into the outer tank;
C) supplying a hydrogen peroxide solution into the inner tank, after beginning the sulfuric-acid-supplying step (B) though while the sulfuric acid is overflowing in the sulfuric-acid-supplying step (B), the hydrogen peroxide solution being supplied from a hydrogen peroxide solution supply unit provided at a position above the inner tank such that the supplied hydrogen peroxide solution makes initial contact with a volume of the sulfuric acid that is flowing from the inner tank to the outer tank such that the hydrogen peroxide solution flows into the outer tank to store in the outer tank the two kinds of liquids of the hydrogen peroxide solution and the sulfuric acid so that the hydrogen peroxide solution is added to the sulfuric acid which has been stored in the outer tank so as to elevate a general ratio of a peroxomonosulfuric acid;
D) activating the return pump simultaneously with the start of the hydrogen-peroxide-solution supplying step (C) to simultaneously send to the inner tank the hydrogen peroxide solution and the sulfuric acid in the outer tank, while mixing the hydrogen peroxide solution and the sulfuric acid with each other in the return pipe; and
E) replenishing a hydrogen peroxide solution by a hydrogen-peroxide-solution replenishing pipe that is communicated with the return pipe,
wherein a heater is provided on the return pipe, and
wherein the replenishing pipe extends into an inside of the return pipe such that a hydrogen peroxide solution can be directly fed into the return pipe, with an outlet of the replenishing pipe downstream in the return pipe from an inlet of the return pipe.

2. The chemical-liquid mixing method according to claim 1 , wherein
the outlet end of the replenishing pipe extends into the inside of the return pipe in a parallel manner with the inlet end of the return pipe.

3. The chemical-liquid mixing method according to claim 1 , wherein
a heater activating step for activating the heater is performed after a preset period of time has passed from the start of the return-pump activating step,
a circulation line including the inner tank, outer tank, and return pipe is provided, such that the liquid circulates in the circulation line, the heater is provided on the return pipe of the circulation line, and the hydrogen peroxide solution and the sulfuric acid are mixed in the circulation line before they are heated by the heater.

4. The chemical-liquid mixing method according to claim 1 , wherein
the hydrogen peroxide solution supply unit is positioned proximate to a wall of the inner tank that is adjacent to the outer tank.

5. The chemical-liquid mixing method according to claim 1 , wherein
initial contact of the supplied hydrogen peroxide solution with the supplied sulfuric acid occurs when the sulfuric acid is overflowing from the inner tank to the outer tank.

6. The chemical-liquid mixing method according to claim 1 , wherein
the replenishing step (E) is performed via a replenishing pipe configured to supply hydrogen peroxide solution to the return pipe with the supplied hydrogen peroxide solution being received at the return pipe without first contacting a liquid in the outer tank.

7. The chemical-liquid mixing method according to claim 1 , wherein
the replenishing step (E) is performed via a replenishing pipe configured to supply hydrogen peroxide solution to the return pipe with the supplied hydrogen peroxide solution being received at the return pipe without first passing through the inner tank.

8. The chemical-liquid mixing method according to claim 7 , wherein
the replenishing step (E) is performed via a replenishing pipe configured to supply hydrogen peroxide solution to the return pipe with the supplied hydrogen peroxide solution being received at the return pipe without first contacting a liquid in the outer tank.

Assignees

• Tanaka Hiroshi
• Hiroshiro Koukichi
• Kamimura Fumihiro
• Tokyo Electron Ltd

Inventors

• Tanaka Hiroshi
• Hiroshiro Koukichi
• Kamimura Fumihiro

Classifications

• H10P72/0416

  with the semiconductor substrates being dipped in baths or vessels · CPC title

• B01F15/0412

  Operations & Transport · mapped topic

• C11D3/3947

  Liquid compositions · CPC title

• B01F3/0861

  Operations & Transport · mapped topic

• B01F5/10

  Operations & Transport · mapped topic