Wafer processing method
US-2024395620-A1 · Nov 28, 2024 · US
US8991464B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8991464-B2 |
| Application number | US-201213588506-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 17, 2012 |
| Priority date | Mar 26, 2008 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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Official abstract text for this publication.
A method of peeling an electronic component. The method includes a step of, when the electronic component is adhered onto a first main surface of a tape member, bringing a bellowphragm into contact with a second main surface, which is the other main surface of the tape member; and a step of, after the bellowphragm is brought into contact with the second main face, deforming the bellowphragm and the tape member by supplying a fluid to the bellowphragm to thereby peel the electronic component from the tape member.
Opening claim text (preview).
What is claimed is: 1. A peeling apparatus for an electronic component that is adhered onto a tape member, comprising: a bellowphragm that is arranged on a side of the tape member, opposite to a side on which the electronic component is provided; a vacuum device that is arranged above the bellowphragm and that vacuums the electronic component; a fluid supply device that supplies a fluid to the bellowphragm to deform the bellowphragm to thereby peel the electronic component fro…
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