System and methods for semiconductor device performance prediction during processing

Patent metadata

Field	Value
Publication number	US-8962353-B2
Application number	US-201113234964-A
Country	US
Kind code	B2
Filing date	Sep 16, 2011
Priority date	Sep 16, 2011
Publication date	Feb 24, 2015
Grant date	Feb 24, 2015

Abstract

Methods and systems for predicting semiconductor device performance criteria during processing. A method is described that includes receiving a semiconductor wafer; performing semiconductor processing on the semiconductor wafer forming active devices that, when completed, will exhibit a device performance criteria; during the semiconductor processing, measuring in line at least one device performance criteria related physical parameter; projecting an estimated value for the device performance criteria of the active devices using the at least one in line measurement and using estimated measurements for device performance criteria related physical parameters corresponding to later semiconductor processing steps; comparing the estimated value for the device performance criteria to an acceptable range; and determining, based on the comparing, whether the active devices on the semiconductor wafer will have a device performance criteria within the acceptable range. A system for processing semiconductor wafers that includes a programmable processor for performing the methods is described.

First claim

What is claimed is:

1. A method, comprising:
receiving a semiconductor wafer for semiconductor processing to form active devices thereon;
performing semiconductor processing on the semiconductor wafer forming active devices that, when completed, will exhibit a device performance criteria;
during the semiconductor processing and prior to completing the forming the active devices on the semiconductor wafer, measuring in line at least one physical parameter of the active devices,…

Assignees

• Wang Jen-Pan
• Chen Chao-Chi
• Huang Yaling
• Taiwan Semiconductor Mfg

Inventors

• Wang Jen-Pan
• Chen Chao-Chi
• Huang Yaling

Classifications

• H10P74/203

  Electricity · mapped topic

• H10P74/23 Primary

  Electricity · mapped topic

• H01L22/20 Primary

  Electricity · mapped topic

• H01L22/12

  Electricity · mapped topic