Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
Heat treatment furnace and heat treatment apparatus
US8957352B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8957352-B2 |
| Application number | US-201213533291-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 26, 2012 |
| Priority date | Jun 27, 2011 |
| Publication date | Feb 17, 2015 |
| Grant date | Feb 17, 2015 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
Provided is a heat treatment furnace, which includes a processing vessel configured to accommodate at least one object to be processed, a heat insulating member configured to cover a periphery of the processing vessel, and a heating unit configured to be arranged along an inner peripheral surface of the heat insulating member. The heat insulating member includes an inner heat insulating member and an outer heat insulating member formed independently of the inner heat insulating member. The outer heat insulating member contains a finely-powdered compressed silica material, and at least an outer surface thereof is covered with an anti-scattering member configured to prevent the finely-powdered compressed silica material from being scattered.
First claim
Opening claim text (preview).
What is claimed is: 1. A heat treatment furnace, comprising: a processing vessel configured to accommodate at least one object to be processed; a heat insulating member configured to cover a periphery of the processing vessel; and a heating unit configured to be arranged along an inner peripheral surface of the heat insulating member, wherein the heat insulating member includes an inner heat insulating member and an outer heat insulating member formed independently of the in…
Assignees
Inventors
Classifications
- H10P72/0434Primary
Electricity · mapped topic
- H10P72/0432Primary
Electricity · mapped topic
Electricity · mapped topic
- H01L21/67103Primary
Electricity · mapped topic
Mechanical Engineering · mapped topic
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Frequently asked questions
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- What does patent US8957352B2 cover?
- Provided is a heat treatment furnace, which includes a processing vessel configured to accommodate at least one object to be processed, a heat insulating member configured to cover a periphery of the processing vessel, and a heating unit configured to be arranged along an inner peripheral surface of the heat insulating member. The heat insulating member includes an inner heat insulating member …
- Who is the assignee on this patent?
- Kobayashi Makoto, Tokyo Electron Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0434. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Feb 17 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).