Grid-less ion energy detector

Patent metadata

Field	Value
Publication number	US-2025292994-A1
Application number	US-202418606289-A
Country	US
Kind code	A1
Filing date	Mar 15, 2024
Priority date	Mar 15, 2024
Publication date	Sep 18, 2025
Grant date	—

Abstract

An ion energy detector includes an ion shield that includes an aperture configured to produce an ion beam from incident ions, an ion collector disposed in a fixed position behind the ion shield, and an ion deflector that includes a pair of parallel plates disposed behind the ion shield. The ion beam travels behind the ion shield along an axis of the aperture. The ion collector is offset from the axis of the aperture. The pair of parallel plates are configured to generate an electric field to deflect the ion beam off the axis and toward the ion collector. The ion energy detector may be included in a detection system and be in physical contact with a substrate, such as on or embedded in the substrate. The ion shield may include an outer surface that has the same electric potential as the substrate.

First claim

What is claimed is:

1 . An ion energy detector comprising:
an ion shield comprising an aperture configured to produce an ion beam from incident ions, the ion beam traveling behind the ion shield along an axis of the aperture; an ion collector disposed in a fixed position behind the ion shield and offset from the axis of the aperture; and an ion deflector comprising a pair of parallel plates disposed behind the ion shield and configured to generate an electric field to deflect the ion beam off the axis of the aperture and toward the ion collector.

2 . The ion energy detector of claim 1 , further comprising:
a front plate comprising an opening, a front side comprising a grounded electrically conductive surface, and a back side comprising an electrically insulating surface facing the ion deflector, the ion beam traveling through the opening of the front plate before reaching the ion deflector.

3 . The ion energy detector of claim 2 , wherein the ion shield comprises the front plate.

4 . The ion energy detector of claim 1 , wherein the ion shield is an enclosure containing the ion collector and the ion deflector.

5 . The ion energy detector of claim 1 , wherein the pair of parallel plates comprises a first plate configured to be coupled to a ground potential and a second plate configured to be coupled to a nonzero voltage.

6 . The ion energy detector of claim 1 , wherein the ion collector is coupled to a negative voltage to suppress secondary electrons.

7 . The ion energy detector of claim 1 , wherein the ion collector is a Faraday cup.

8 . An ion energy detection system comprising:
a substrate; and an ion energy detector in physical contact with the substrate, the ion energy detector comprising
an enclosure comprising an ion shield comprising an outer shield surface and an aperture configured to produce an ion beam from incident ions, the outer shield surface having the same electric potential as the substrate, the ion beam traveling into the enclosure along an axis of the aperture,
an ion collector disposed in a fixed position in the enclosure and offset from the axis of the aperture, and
an ion deflector comprising a pair of parallel plates disposed in the enclosure and configured to generate an electric field to deflect the ion beam off the axis of the aperture and toward the ion collector.

9 . The ion energy detection system of claim 8 , wherein the pair of parallel plates comprises a first plate configured to be coupled to a ground potential and a second plate configured to be coupled to a nonzero voltage.

10 . The ion energy detection system of claim 8 , wherein all spatial dimensions of the enclosure are less than about 30 mm.

11 . The ion energy detection system of claim 8 , wherein the enclosure further comprises an outer enclosure surface in direct contact with the substrate, the outer enclosure surface being electrically coupled to the outer shield surface.

12 . The ion energy detection system of claim 8 , wherein the ion energy detector is embedded in the substrate.

13 . The ion energy detection system of claim 8 , further comprising:
an array of ion energy detectors comprising the ion energy detector and a plurality of additional ion energy detectors.

14 . The ion energy detection system of claim 8 , wherein the ion collector is a Faraday cup.

15 . A plasma system comprising:
a chamber configured to contain a plasma; a substrate disposed in the chamber; an ion energy detector in physical contact with the substrate, the ion energy detector comprising
an enclosure comprising an ion shield comprising an outer shield surface and an aperture configured to produce an ion beam from the plasma, the outer shield surface having the same electric potential as the substrate, the ion beam traveling into the enclosure along an axis of the aperture,
an ion collector disposed in a fixed position in the enclosure and offset from the axis of the aperture, and
an ion deflector comprising a pair of parallel plates disposed in the enclosure; and
a controller operatively coupled to the ion energy detector, the controller comprising a processor and a non-transitory computer-readable medium storing a program including instructions that, when executed by the processor, perform a method of measuring ion energy of the plasma, the method comprising
applying a voltage difference between the pair of parallel plates to generate an electric field deflecting the ion beam off the axis of the aperture and toward the ion collector,
measuring ion flux from the ion beam deflected by the voltage difference, and
obtaining ion energy of ions of the ion flux by scaling the voltage difference with a constant value.

16 . The plasma system of claim 15 , wherein the program includes further instructions for
sweeping the voltage difference from an initial voltage to a final voltage, measuring the ion flux as a function of the voltage difference while sweeping the voltage difference, and obtaining an ion energy distribution of the plasma by scaling the voltage difference with the constant value.

17 . The plasma system of claim 16 , wherein the program includes further instructions for
repeatedly sweeping the voltage difference between the initial voltage and the final voltage, measuring the ion flux as a function of the voltage difference while repeatedly sweeping the voltage difference, and obtaining the ion energy distribution as a function of time by scaling the voltage difference with the constant value.

18 . The plasma system of claim 17 , wherein the ion energy distribution as a function of time has a resolution on the order of hundreds of nanoseconds.

19 . The plasma system of claim 15 , wherein the ion energy is greater than about 10 keV.

20 . The plasma system of claim 15 , further comprising:
an array of ion energy detectors comprising the ion energy detector and a plurality of additional ion energy detectors, wherein the ion energy detectors of the array comprise apertures shaped differently from one another; and wherein the program includes further instructions for obtaining ion conductance of the plasma.

Assignees

• Tokyo Electron Ltd

Inventors

• Chen Zhiying
• Ventzek Peter Lowell George
• Hummel Michael
• Carruth Megan
• Blakeney Joel
• Sridhar Shyam

Classifications

• H01J37/3299

  Feedback systems · CPC title

• H01J37/244 Primary

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/32926

  Software, data control or modelling · CPC title

• H01J2237/24405

  Faraday cages · CPC title

• H01J37/32651

  Shields, e.g. dark space shields, Faraday shields · CPC title