Adhesive containing polyether-modified siloxane

Patent metadata

Field	Value
Publication number	US-2025215294-A1
Application number	US-202318849820-A
Country	US
Kind code	A1
Filing date	Mar 16, 2023
Priority date	Mar 24, 2022
Publication date	Jul 3, 2025
Grant date	—

Abstract

An adhesive for peelably bonding between a support and a circuit surface of a wafer to allow for processing of a back surface of the wafer, the adhesive including a component (A) that cures through a hydrosilylation reaction and a component (B) containing a polyether-modified siloxane.

First claim

1 . An adhesive for peelably bonding between a support and a circuit surface of a wafer to allow for processing of a back surface of the wafer, the adhesive comprising a component (A) that cures through a hydrosilylation reaction and a component (B) containing a polyether-modified siloxane.

2 . The adhesive according to claim 1 , wherein
the component (A) contains a polysiloxane (A1) and a platinum group metal-based catalyst (A2), in which the polysiloxane (A1) includes a polyorganosiloxane (a1) and a polyorganosiloxane (a2), the polyorganosiloxane (a1) includes a polysiloxane containing at least one unit selected from the group consisting of a siloxane unit represented by SiO 2 (Q unit), a siloxane unit represented by R 1 R 2 R 3 SiO 1/2 (M unit), a siloxane unit represented by R 4 R 5 SiO 2/2 (D unit), and a siloxane unit represented by R 6 SiO 3/2 (T unit) (the R 1 to R 6 each independently represent an alkyl group having 1 to 10 carbon atoms or an alkenyl group having 2 to 10 carbon atoms, and are bonded to a silicon atom by a Si—C bond, and the polysiloxane contains an alkyl group having 1 to 10 carbon atoms and an alkenyl group having 2 to 10 carbon atoms), and the polyorganosiloxane (a2) includes a polysiloxane containing at least one unit selected from the group consisting of a siloxane unit represented by SiO 2 (Q unit), a siloxane unit represented by R 1 R 2 R 3 SiO 1/2 (M unit), a siloxane unit represented by R 4 R 5 SiO 2/2 (D unit), and a siloxane unit represented by R 6 SiO 3/2 (T unit) (the R 1 to R 6 each independently represent an alkyl group having 1 to 10 carbon atoms or a hydrogen atom, and are bonded to a silicon atom by a Si—C bond or an Si—H bond, and the polysiloxane contains an alkyl group having 1 to 10 carbon atoms and an Si—H group).

3 . The adhesive according to claim 1 , wherein
the component (B) contains a polyether-modified siloxane having a group represented by the following formula (B-1) or a polyether-modified siloxane represented by the following formula (B-2)

(in the formula (B-1), R represents a group containing a poly(oxyethylene) and/or poly(oxypropylene) group, and n and m each represent an integer)

(in the formula (B-2), n, x and y each represent an integer).

4 . The adhesive according to claim 3 , wherein
in the formula (B-1), the group represented by R is a poly(oxyethylene) group, a poly(oxypropylene) group, or a group represented by the following formula (B-1-1)

(in the formula (B-1-1), A represents H or CH 3 , * represents a bond, a and b each represent an integer of 0 or more, and a+b is an integer of 1 or more).

5 . The adhesive according to claim 1 , wherein the processing is back surface polishing of the wafer.

6 . A laminate comprising:
a first body; a second body; and an adhesive layer provided between the first body and the second body, wherein the adhesive layer is formed of the adhesive according to claim 1 .

7 . A method for producing a laminate, comprising applying the adhesive according to claim 1 onto a first body to form a coating film, disposing a second body on a side of the coating film opposite to a side of the first body, and performing heating in a bonding state in which the first body and the coating film are in contact with each other and the coating film and the second body are in contact with each other, thereby forming a laminate in which the first body and the second body are bonded via an adhesive layer.

8 . The method for producing a laminate according to claim 7 , wherein the first body is a support, the second body is a wafer, and a circuit surface of the wafer faces the first body.

9 . The method for producing a laminate according to claim 7 , wherein the first body is a wafer, the second body is a support, and a circuit surface of the wafer faces the second body.

10 . A method for peeling off a laminate, comprising applying the adhesive according to claim 1 onto a first body to form a coating film, disposing a second body on a side of the coating film opposite to a side of the first body, and performing heating in a bonding state in which the first body and the coating film are in contact with each other and the coating film and the second body are in contact with each other, thereby forming a laminate in which the first body and the second body are bonded to each other via an adhesive layer, processing the formed laminate, and then peeling off the first body and the second body.

11 . A method for peeling off a laminate, comprising applying the adhesive according to claim 5 onto a first body to form a coating film, disposing a second body on a side of the coating film opposite to a side of the first body, and performing heating in a bonding state in which the first body and the coating film are in contact with each other and the coating film and the second body are in contact with each other, thereby forming a laminate in which the first body and the second body are bonded to each other via an adhesive layer, processing the formed laminate, and then peeling off the first body and the second body.

12 . The method for peeling off a laminate according to claim 10 , wherein the first body is a support, the second body is a wafer, and a circuit surface of the wafer faces the first body.

13 . The method for peeling off a laminate according to claim 11 , wherein the first body is a support, the second body is a wafer, and a circuit surface of the wafer faces the first body.

14 . The method for peeling off a laminate according to claim 10 , wherein the first body is a wafer, the second body is a support, and a circuit surface of the wafer faces the second body.

15 . The method for peeling off a laminate according to claim 11 , wherein the first body is a wafer, the second body is a support, and a circuit surface of the wafer faces the second body.

16 . The method for peeling off a laminate according to claim 10 , wherein the processing is back surface polishing of the wafer.

Assignees

• Nissan Chemical Corp

Inventors

• Yanai Masaki
• Okuno Takahisa
• Shinjo Tetsuya

Classifications

• H10P72/74

  using temporarily an auxiliary support · CPC title

• H10P72/744

  Details of chemical or physical process used for separating the auxiliary support from a device or a wafer · CPC title

• H10P72/7442

  Separation by peeling · CPC title

• H10P72/7422

  used to protect an active side of a device or wafer · CPC title

• H10P72/7416

  used during dicing or grinding · CPC title