Liquid circulation system, substrate processing apparatus, and liquid circulation method

Patent metadata

Field	Value
Publication number	US-2024420970-A1
Application number	US-202218703525-A
Country	US
Kind code	A1
Filing date	Oct 25, 2022
Priority date	Nov 4, 2021
Publication date	Dec 19, 2024
Grant date	—

Abstract

A liquid circulation system according to an aspect of the present disclosure is for recovering an ionic liquid supplied into a vacuum chamber and returning the recovered ionic liquid back again into the vacuum chamber, and includes a storage tank having an opening communicating with an inside of the vacuum chamber and configured to store the ionic liquid recovered from the inside of the vacuum chamber through the opening, a viscosity pump provided below the storage tank in a vertical direction, and a pipe configured to supply the ionic liquid inside the storage tank into the vacuum chamber.

First claim

1 . A liquid circulation system for recovering an ionic liquid supplied into a vacuum chamber and returning the recovered ionic liquid back again into the vacuum chamber, the liquid circulation system comprising:
a storage tank, having an opening communicating with an inside of the vacuum chamber, and configured to store the ionic liquid recovered from the inside of the vacuum chamber through the opening; a viscosity pump provided below the storage tank in a vertical direction; and a pipe configured to supply the ionic liquid inside the storage tank into the vacuum chamber.

2 . The liquid circulation system as claimed in claim 1 , wherein the viscosity pump is connected to a lower end of the storage tank.

3 . The liquid circulation system as claimed in claim 1 , wherein the viscosity pump includes a cylindrical housing, and a rotor configured to rotate inside the housing with a center axis of the housing as a rotation axis thereof.

4 . The liquid circulation system as claimed in claim 3 , wherein the rotor is provided below a liquid level of the ionic liquid in the vertical direction.

5 . The liquid circulation system as claimed in claim 3 , wherein a spiral groove is formed in an outer peripheral surface of the rotor.

6 . The liquid circulation system as claimed in claim 3 , wherein a gap is provided between an outer peripheral surface of the rotor and an inner peripheral surface of the housing.

7 . The liquid circulation system as claimed in claim 3 , wherein the storage tank has a cylindrical shape with an inner diameter greater than or equal to an inner diameter of the housing.

8 . The liquid circulation system as claimed in claim 1 , further comprising:
a diaphragm pump provided between the viscosity pump and the pipe.

9 . The liquid circulation system as claimed in claim 1 , further comprising:
a flow rate controller configured to control a flow rate of the ionic liquid flowing through the pipe.

10 . The liquid circulation system as claimed in claim 9 , further comprising:
a sensor configured to detect a pressure inside the pipe, wherein the flow rate controller controls the flow rate based on the pressure detected by the sensor.

11 . The liquid circulation system as claimed in claim 1 , further comprising:
a splash shield, provided at the opening of the storage tank, and configured to shield splash from the inside of the storage tank from entering into the vacuum chamber.

12 . The liquid circulation system as claimed in claim 1 , further comprising:
a temperature controller configured to control a temperature of the ionic liquid inside the storage tank.

13 . The liquid circulation system as claimed in claim 1 , wherein the inside of the vacuum chamber is maintained at an ultrahigh vacuum of 10 −5 Pa to 10 −8 Pa.

14 . A substrate processing apparatus comprising:
a vacuum chamber configured to process a substrate; and a liquid circulation system configured to recover an ionic liquid supplied into the vacuum chamber and return the ionic liquid back again into the vacuum chamber, wherein the liquid circulation system includes:
a storage tank, having a first opening communicating with an inside of the vacuum chamber, and configured to store the ionic liquid recovered from the inside of the vacuum chamber through the first opening;
a viscosity pump provided below the storage tank in a vertical direction; and
a pipe configured to supply the ionic liquid inside the storage tank into the vacuum chamber.

15 . The substrate processing apparatus as claimed in claim 14 , further comprising:
a gate valve configured to open and close a second opening formed in a chamber wall of the vacuum chamber, wherein the gate valve includes:
a gate shutter configured to move between a position to close the second opening and a position to open the second opening;
a floating body pressed upward in the vertical direction by the gate shutter; and
a fluid bearing, supplied with the ionic liquid from the liquid circulation system, and configured to support the floating body by pressing the floating body downward in the vertical direction.

16 . The substrate processing apparatus as claimed in claim 14 , further comprising:
a rotary stage provided inside the vacuum chamber; a rotating shaft, connected to a lower portion of the rotary stage, and configured to rotate the rotary stage; a bearing housing having a hollow shape, with the rotating shaft inserted into a hollow portion of the bearing housing; and a fluid bearing, supplied with the ionic liquid from the liquid circulation system, and configured to support the rotating shaft with respect to the bearing housing.

17 . A liquid circulation method for recovering an ionic liquid supplied into a vacuum chamber and returning the recovered ionic liquid back again into the vacuum chamber, the liquid circulation method comprising:
recovering the ionic liquid from inside the vacuum chamber through an opening communicating with the vacuum chamber, and storing the ionic liquid recovered from the inside of the vacuum chamber into a storage tank; and supplying the ionic liquid into the vacuum chamber via a pipe by a viscosity pump provided below the storage tank in the vertical direction.

Assignees

• Tokyo Electron Ltd
• Univ Tokyo Science Found

Inventors

• Okabe Takao
• Ueda Hirokazu
• Umeshita Naoki
• Iwashita Mitsuaki
• Sekiguchi Kenji
• Akiyama Koji
• Morimoto Tamotsu
• Akimoto Toshikazu

Classifications

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• B01J3/02

  Feed or outlet devices therefor · CPC title

• F16C32/0629

  supported by a liquid cushion, e.g. oil cushion · CPC title

• F04B43/02

  having plate-like flexible members, e.g. diaphragms (F04B43/14 takes precedence) · CPC title