Method for III-v/silicon hybrid integration
US-11953728-B2 · Apr 9, 2024 · US
US2024402427A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2024402427-A1 |
| Application number | US-202418629756-A |
| Country | US |
| Kind code | A1 |
| Filing date | Apr 8, 2024 |
| Priority date | Aug 6, 2018 |
| Publication date | Dec 5, 2024 |
| Grant date | — |
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A method of transfer printing. The method comprising: providing a precursor photonic device, comprising a substrate and a bonding region, wherein the precursor photonic device includes one or more alignment marks located in or adjacent to the bonding region; providing a transfer die, said transfer die including one or more alignment marks; aligning the one or more alignment marks of the precursor photonic device with the one or more alignment marks of the transfer die; and bonding at least a part of the transfer die to the bonding region.
Opening claim text (preview).
1 . A method of transfer printing, comprising: providing a precursor photonic device, comprising a substrate and a bonding region, wherein the precursor photonic device includes one or more alignment marks located in or adjacent to the bonding region; providing a transfer die, said transfer die including one or more alignment marks; aligning the one or more alignment marks of the precursor photonic device with the one or more alignment marks of the transfer die; and bonding at least a part of the transfer die to the bonding region. 2 - 64 . (canceled)
Vertical transfer of a single workpiece · CPC title
using optical controlling means · CPC title
for alignment · CPC title
Package configurations · CPC title
Marks applied to devices, e.g. for alignment or identification · CPC title
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