Reticle compact box opener

Patent metadata

Field	Value
Publication number	US-2024174396-A1
Application number	US-202218071097-A
Country	US
Kind code	A1
Filing date	Nov 29, 2022
Priority date	Nov 29, 2022
Publication date	May 30, 2024
Grant date	—

Abstract

An apparatus, system and method for a compact box opener suitable for opening a compact box containing therein a reticle. The embodiments provide: a flowthrough deck; a plurality of location guides on the flowthrough deck suitable to mate with guides on a base of the compact box; a plurality of vacuum ports on the plurality of location guides capable of retaining the guides on the base; a lid opening arm having a suction cup at an end thereof, wherein the suction cup is capable of gripping a lid of the compact box and opening the lid by an actuation of the lid opening arm; rotary-actuated arms that are raised for initial actuation within the drawer above a rim of the compact box and which, when actuated, rotate jaws at an end of each of the rotary-actuated arms inward over the rim and downward to a height below a lower plane of the reticle; and at least one angular notch in each of the jaws suitable to grip a radiused edge of the reticle. Once the radiused edge of the reticle is gripped by the inward movement of the jaws, the jaws are raised while the reticle remains gripped until the reticle is at a second height fully above the rim.

First claim

What is claimed is:

1 . A compact box opener suitable for association with a drawer in a work cell and capable of opening a compact box containing therein a reticle, comprising:
a flowthrough deck; a plurality of location guides on the flowthrough deck suitable to mate with guides on a base of the compact box; a plurality of vacuum ports on the plurality of location guides capable of retaining the guides on the base; a lid opening arm having a suction cup at an end thereof, wherein the suction cup is capable of gripping a lid of the compact box and opening the lid by an actuation of the lid opening arm; rotary-actuated arms that are raised for initial actuation within the drawer above a rim of the compact box and which, when actuated, rotate jaws at an end of each of the rotary-actuated arms inward over the rim and downward to a height below a lower plane of the reticle; and at least one angular notch in each of the jaws suitable to grip a radiused edge of the reticle; wherein, once the radiused edge of the reticle is gripped by the inward movement of the jaws, the jaws are raised while the reticle remains gripped until the reticle is at a second height fully above the rim.

2 . The compact box opener of claim 1 , wherein the flowthrough deck provides vacuum flow therethrough to decrease particulate near the reticle.

3 . The compact box opener of claim 1 , wherein the vacuum ports are located at a base of the location guides.

4 . The compact box opener of claim 1 , wherein the location guides mate with the guides on the base using a matching angle.

5 . The compact box opener of claim 1 , wherein the vacuum ports are corresponded one per each of the location guides.

6 . The compact box opener of claim 1 , wherein multiple ones of the vacuum ports are corresponded to each of the location guides.

7 . The compact box opener of claim 1 , further comprising at least one sensor on the drawer which capable of sensing the compact box so as to inform decisions by a work cell operator.

8 . The compact box opener of claim 7 , wherein the work cell operator is manual.

9 . The compact box opener of claim 7 , wherein the at least one sensor comprises an open switch for indicating when the drawer is fully open.

10 . The compact box opener of claim 7 , wherein the at least one sensor comprises an open circuit sensor indicating when the compact box is not gripped by the vacuum ports.

11 . The compact box opener of claim 1 , further comprising status lights on the drawer for indicating a status of the compact box opener.

12 . The compact box opener of claim 1 , wherein there are two of the rotary-actuated arms.

13 . The compact box opener of claim 1 , further comprising a vertical actuator at least partly capable of the raising of the rotary-actuated arms.

14 . The compact box opener of claim 1 , wherein the plurality of the location guides are four in number, and are proximate to corners of the flowthrough deck.

15 . The compact box opener of claim 1 , further comprising a cammed latch opener capable of opening manual latches at a front of the compact box.

16 . The compact box opener of claim 1 , further comprising a lock cylinder capable of locking at least the drawer and the rotary actuated arms.

17 . The compact box opener of claim 16 , further comprising a safety interlock switch capable of actuating the lock cylinder upon a loss of power or upon a significant gyroscopic change in position of the work cell.

18 . The compact box opener of claim 1 , further comprising a transverse slide capable of varying a distance between the arms as they are raised.

19 . The compact box opener of claim 13 , the vertical actuator comprising a vertical backplate and one or more actuators.

20 . The compact box opener of claim 19 , wherein the actuators comprise one of cams or pistons.

Assignees

• Jabil Inc

Inventors

• Bosboom Jeroen

Classifications

• H10P72/1906

  specially adapted for containing masks, reticles or pellicles · CPC title

• H10P72/3406

  involving removal of lid, door or cover · CPC title

• H10P72/1918

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title

• H10P72/1902

  specially adapted for a single substrate · CPC title

• G03F1/66 Primary

  Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof · CPC title