Coated substrate support assembly for substrate processing in processing chambers

Patent metadata

Field	Value
Publication number	US-2024141488-A1
Application number	US-202218050375-A
Country	US
Kind code	A1
Filing date	Oct 27, 2022
Priority date	Oct 27, 2022
Publication date	May 2, 2024
Grant date	—

Abstract

Embodiments of the present disclosure generally relate to a substrate support having a surface coating which reduces defect formation and back side metal contamination during substrate processing. A support body includes a body having an outer surface and a surface coating formed from a non-metal or a reduced-metal material disposed over at least a top surface of the outer surface of the body. In an embodiment, the surface coating includes a two-part coating having an optional first coating layer formed over an entire outer surface of the support body.

First claim

1 . A method of forming surface coatings, comprising:
depositing a first material over an outer surface of a support body for a processing chamber to form a first coating layer on the support body, the outer surface of the support body including a top surface, the first material including at least one of a metal-containing material or alloy; and depositing a second material over at least a portion of the first coating layer disposed over the top surface of the support body, thereby forming a second coating layer, wherein the second material is a non-metal or a reduced-metal material.

2 . The method of claim 1 , wherein depositing the second material comprises depositing the second material over a substrate support surface on the top surface of the support body, the substrate support surface extending a first radial distance from a center of the support body.

3 . The method of claim 1 , further comprising depositing the second material over an entirety of the support body.

4 . The method of claim 1 , wherein depositing the first material comprises performing an ENP process to form the first coating layer, the first coating layer having a thickness in a range of about 10 μm to about 50 μm.

5 . The method of claim 1 , wherein depositing the second material comprises performing an EBIAD process to form the second coating layer, the second coating layer having a thickness in a range of about 50 nm to about 15 μm.

6 . The method of claim 1 , wherein depositing the first material comprises performing an ALD process to form the first coating layer, the first coating layer having a thickness in a range of about 5 nm to about 300 nm.

7 . The method of claim 1 , wherein depositing the second material comprises performing an ALD process to form the second coating layer, the second coating layer having a thickness in a range of about 5 nm to about 500 nm.

8 . The method of claim 1 , wherein the first coating layer comprises a nickel-phosphorous alloy, and wherein the second coating layer comprises a material selected from the group consisting of YOF, YF 3 , and Y 2 O 3 .

9 . The method of claim 1 , wherein depositing the first material comprises performing an ALD process to form the first coating layer, the first coating layer comprising Al 2 O 3 , and wherein depositing the second material comprises performing an ALD process to form the second coating layer, the second coating layer comprising a material selected from the group consisting of YOF, YF 3 , and Y 2 O 3 .

10 . A support body for supporting a substrate in a processing chamber, comprising:
a body having an outer surface, the outer surface including a top surface; and a two-part coating disposed over the outer surface of the body, the two-part coating comprising:
a first coating layer disposed over an entirety of the outer surface of the body, the first coating layer including at least one of a metal-containing material or alloy and comprising a thickness between about 5 nm and about 300 nm; and
a second coating layer disposed over the first coating layer, the second coating layer disposed over at least a portion of the first coating layer disposed over the top surface of the body and extending a radial distance from a center of the body, wherein the second coating layer is a non-metal or reduced-metal coating and comprises a thickness between about 100 nm and about 500 nm.

11 . The support body of claim 10 , wherein the second coating layer is disposed over an entirety of the first coating layer.

12 . The support body of claim 10 , wherein the second coating layer is disposed over a substrate contact surface on the top surface of the body.

13 . The support body of claim 10 , wherein the first coating layer comprises a nickel-phosphorous alloy, and wherein the second coating layer comprises a material selected from the group consisting of yttrium oxyfluoride (YOF), yttrium fluoride (YF 3 ), and yttrium oxide (Y 2 O 3 ).

14 . The support body of claim 10 , wherein the first coating layer comprises Al 2 O 3 , and wherein the second coating layer comprises a material selected from the group consisting of YOF, YF 3 , and Y 2 O 3 .

15 . The support body of claim 10 , wherein the first coating layer comprises SiO 2 , and wherein the second coating layer comprises a material selected from the group consisting of YOF, YF 3 , and Y 2 O 3 .

16 . The support body of claim 10 , wherein the body comprises aluminum, aluminum oxide, aluminum nitride, or combinations thereof.

17 . A system comprising:
a processing chamber configured to clean a substrate, the processing chamber comprising:
a chamber body;
a lid assembly disposed at an upper end of the chamber body, the lid assembly comprising:
a dual channel showerhead having a first set of channels providing fluid communication above and below a plane of the showerhead; and
a second set of channels providing fluid communication with a side port of the chamber body; and

a substrate support assembly at least partially disposed within the chamber body, the substrate support assembly configured to support the substrate in the processing chamber, the substrate support assembly comprising:
a support body having an outer surface, the outer surface including a substrate supporting surface on a top surface of the support body, the substrate supporting surface extending a first radial distance from a center of the support body;
a stem coupled to the support body; and
a coating disposed over the support body, the coating comprising:
a first coating layer disposed over an entirety of the outer surface of the support body, the first coating layer comprising a thickness between about 5 nm and about 300 nm; and
a second coating layer disposed over the first coating layer, the second coating layer extending over at least the substrate supporting surface of the support body and comprising a thickness between about 100 nm and about 500 nm.

18 . The system of claim 17 , wherein the second coating layer is disposed over an entirety of the first coating layer.

19 . The system of claim 17 , wherein the first coating layer comprises one of a nickel-phosphorous alloy or Al 2 O 3 , and wherein the second coating layer comprises a material selected from the group consisting of YOF, YF 3 , and Y 2 O 3 .

20 . The system of claim 17 , further comprising an epitaxy chamber to grow an epitaxial layer on the substrate after the substrate is cleaned by the processing chamber.

Assignees

• Applied Materials Inc

Inventors

• Jorgensen David
• Lee Songjae
• Wang Hao
• Huang Yi-Chiau
• Beaudry Christopher

Classifications

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/0434

  mainly by convection · CPC title

• C23C28/3455

  with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer · CPC title

• C23C28/042

  including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides · CPC title