Coated substrate support assembly for substrate processing in processing chambers
US-2025250670-A1 · Aug 7, 2025 · US
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Patent family 90831559
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 90831559 |
| Family type | — |
| Earliest priority | Oct 27, 2022 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US2025250670A1 — Coated substrate support assembly for substrate processing in processing chambers |
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US2025250670A1 — Coated substrate support assembly for substrate processing in processing chambers (published Aug 7, 2025)
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