Supercritical Fluid Cleaning for Components in Optical or Electron Beam Systems

Patent metadata

Field	Value
Publication number	US-2023191461-A1
Application number	US-202218078913-A
Country	US
Kind code	A1
Filing date	Dec 9, 2022
Priority date	Dec 22, 2021
Publication date	Jun 22, 2023
Grant date	—

Abstract

To clean components in semiconductor manufacturing equipment, such as an optical system or an electron beam system, a component is heated in a chamber. A supercritical fluid formulation is applied to the component in the chamber, which removes molecular and/or particulate contaminants. The supercritical fluid formulation can include one or more of carbon dioxide, water, HCF, alkane, alkene, nitrous oxide, methanol, ethanol, or acetone.

First claim

What is claimed is:

1 . A cleaning method comprising:
heating a component of an optical system or an electron beam system in a chamber; and applying a supercritical fluid formulation to the component in the chamber thereby removing molecular and/or particulate contaminants, wherein the supercritical fluid formulation includes one or more of carbon dioxide, water, HCF, alkane, alkene, nitrous oxide, methanol, ethanol, or acetone.

2 . The cleaning method of claim 1 , wherein the supercritical fluid formulation includes carbon dioxide.

3 . The cleaning method of claim 1 , wherein the supercritical fluid formulation includes a co-solvent that includes one or more of an alcohol, an ether, a thiol, a ketone, a hydrocarbon, a nitrile, an amide, an aromatic compound, an aprotic solvent, HFC, DMF, or NMP.

4 . The cleaning method of claim 1 , wherein the supercritical fluid formulation includes a surfactant that includes one or more of acetyl acetone, hexafluoro acetyl acetone, an acetylenic alcohol, a diol, a long alkyl chain secondary amine, or a tertiary amine.

5 . The cleaning method of claim 1 , wherein the supercritical fluid formulation includes a chelating agent that includes one or more of citric acid, EDTA, oxalic acid, a polycarboxylic acid, a substituted dithiocarbamate, a malonic acid ester, or polyethylene glycol.

6 . The cleaning method of claim 1 , wherein the supercritical fluid formulation includes an oxidant that includes one or more of ozone or hydrogen peroxide.

7 . The cleaning method of claim 1 , wherein the supercritical fluid formulation includes a dispersant that includes one or more of sodium tripolyphosphate or a quaternary ammonium salt.

8 . The cleaning method of claim 1 , wherein the component is a laser source, an x-ray light source, a DUV source, an EUV source, an illumination optics, a collection optics, or a broadband plasma and laser cavity.

9 . The cleaning method of claim 1 , wherein the component is an electron gun system, an electron column system, a vacuum chamber, or a platform.

10 . The cleaning method of claim 1 , wherein the component is an optics, and wherein the optics includes CLBO, BBO, KTP, PPKTP, LBO, DKDP, ADP, KDP, LiIO3, KNbO 3 , LiNbO 3 , AgGaS 2 , AgGaSe 2 , MgF 2 , CaF 2 , BaF 2 , LiF, YAG, TGG, TiO 2 , ZnS, ZnSe, GaAs, or SiGe.

11 . The cleaning method of claim 1 , wherein the component is a crystal, and wherein the crystal includes an oxide coating, Ta 2 O 5 , ZrO 2 , HfO 2 , A1 2 O 3 , SiO 2 , Nb 2 O 5 , TiO 2 , FS, SBO, a fluoride coating, LiF, CaF 2 , MgF 2 , LaF 3 , AIF 3 , LiF, LaF 3 , GdF 3 , or NdF 3 .

12 . The cleaning method of claim 1 , wherein the component is a precision aperture, pneumatic delivering system, electron beam aperture, vacuum compatible mechanics, or an optomechanics.

13 . The cleaning method of claim 1 , wherein the component is a cable, printed circuit board, sensor, piezoelectric component, electron beam deflector, electrostatic lens, or pin-diode.

14 . The cleaning method of claim 1 , wherein the component is an light-emitting diode, emitter, time delay and integration sensor, charge-coupled device, or complementary metal-oxide-semiconductor.

15 . The cleaning method of claim 1 , wherein the component is a sealing material, and wherein the sealing material includes indium, copper, silver, or a polymer.

16 . The cleaning method of claim 1 , further comprising passivating the component after the applying.

17 . A cleaning system comprising:
a supercritical fluid chamber configured to hold a component that is cleaned; a CO 2 tank; a fluid line connecting the CO 2 tank to the supercritical fluid chamber; a heater disposed on the supercritical fluid chamber that is configured to heat the component; and a pump disposed on the fluid line configured to pressurize CO 2 from the CO 2 tank, wherein the heater and the pump are configured to operate such that the CO 2 is applied to the component as supercritical CO 2 .

18 . The cleaning system of claim 17 , further comprising a CO 2 recycle system in fluid communication with the supercritical fluid chamber and the CO 2 tank.

19 . The cleaning system of claim 17 , further comprising an additional tank in fluid communication with the fluid line, wherein the additional tank holds one or more of a co-solvent, a surfactant, a chelating agent, an oxidant, or a dispersant.

Assignees

• Kla Corp

Inventors

• Sun jiulong
• Jiang Eric
• Ehsani Ali
• Rose Garry
• Taylor Boyd

Classifications

• H10P70/80

  Cleaning only by supercritical fluids · CPC title

• C11D7/50

  Solvents · CPC title

• C11D7/3209

  Amines or imines with one to four nitrogen atoms; Quaternized amines · CPC title

• C11D11/0047

  Chemistry & Metallurgy · mapped topic

• B08B7/0021 Primary

  by liquid gases or supercritical fluids · CPC title