Supercritical Fluid Cleaning for Components in Optical or Electron Beam Systems
US-2025178042-A1 · Jun 5, 2025 · US
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Patent family 86767044
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 86767044 |
| Family type | — |
| Earliest priority | Dec 22, 2021 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US2025178042A1 — Supercritical Fluid Cleaning for Components in Optical or Electron Beam Systems |
Representative publication
Best representative member for this family based on priority and filing country.
US2025178042A1 — Supercritical Fluid Cleaning for Components in Optical or Electron Beam Systems (published Jun 5, 2025)
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