Systems for providing illumination in optical metrology
US-9512985-B2 · Dec 6, 2016 · US
US2023104797A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2023104797-A1 |
| Application number | US-202217956186-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 29, 2022 |
| Priority date | Oct 4, 2021 |
| Publication date | Apr 6, 2023 |
| Grant date | — |
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A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion which is provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; a second window portion provided to the housing and from which second light that is light from the plasma is emitted; and a getter portion including a getter material and disposed in an irradiation region of the first light inside the housing.
Opening claim text (preview).
What is claimed is: 1 . A light emitting sealed body comprising: a housing containing light-emitting gas in an internal space; a first window portion provided to the housing and on which first light is incident, wherein the first light is laser light for maintaining a plasma generated in the light-emitting gas; a second window portion provided to the housing and from which second light is emitted, wherein the second light is light from the plasma; and a getter portion including a getter material and disposed in an irradiation region of the first light inside the housing. 2 . The light emitting sealed body according to claim 1 , wherein the getter portion further includes a support member supporting the getter material. 3 . The light emitting sealed body according to claim 2 , wherein the getter portion is disposed such that the getter material faces a side opposite the first window portion. 4 . The light emitting sealed body according to claim 2 , wherein the getter portion is disposed such that the support member is irradiated with the first light. 5 . The light emitting sealed body according to claim 2 , wherein a melting point of the support member is higher than a melting point of the getter material. 6 . The light emitting sealed body according to claim 2 , wherein a thermal conductivity of the support member is higher than a thermal conductivity of the getter material. 7 . The light emitting sealed body according to claim 1 , wherein the getter portion is disposed such that the getter material faces an inner surface of the housing, the inner surface facing the first window portion. 8 . The light emitting sealed body according to claim 1 , wherein the getter portion is disposed to define a space between the getter portion and an inner surface of the housing. 9 . The light emitting sealed body according to claim 1 , wherein an exhaust hole for discharging gas from the internal space to an outside is formed in the housing, and the getter portion is disposed between a generation position of the second light and the exhaust hole in the internal space. 10 . The light emitting sealed body according to claim 1 , wherein a distance from the getter material to a generation position of the second light is longer than a distance from the generation position of the second light to the first window portion. 11 . The light emitting sealed body according to claim 1 , wherein the getter material is fixed to an inner surface of the housing. 12 . The light emitting sealed body according to claim 1 , wherein an inner surface of the housing includes an inner peripheral surface extending with a straight line parallel to an optical axis of the first light as a center line, and the getter material is fixed to the inner peripheral surface. 13 . The light emitting sealed body according to claim 1 , wherein the getter material is configured as a non-evaporable type. 14 . The light emitting sealed body according to claim 1 , wherein the getter material is configured as an evaporable type. 15 . The light emitting sealed body according to claim 1 , wherein at least one of the first window portion and the second window portion includes a window member made of a material containing diamond. 16 . The light emitting sealed body according to claim 1 , wherein the housing is made of a metal material. 17 . The light emitting sealed body according to claim 1 , further comprising: a first electrode and a second electrode facing each other with a generation position of the second light interposed between the first electrode and the second electrode. 18 . The light emitting sealed body according to claim 1 , wherein a charging pressure of the light-emitting gas in the housing is 3 MPa or more. 19 . A light source device comprising: the light emitting sealed body according to claim 1 ; and a light introduction unit that causes the first light to be incident on the first window portion. 20 . A method for driving a light emitting sealed body including a housing containing light-emitting gas in an internal space, on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident and from which second light that is light from the plasma is emitted, and a getter portion including a getter material and being disposed in an irradiation region of the first light inside the housing, the method comprising: activating the getter material by irradiating the getter material with the first light; and generating the plasma in the light-emitting gas and emitting the second light.
Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating {plasma display panels} · CPC title
Means for absorbing or adsorbing gas, e.g. by gettering; Means for preventing blackening of the envelope · CPC title
by an external electromagnetic field · CPC title
having helium, argon, neon, krypton, or xenon as the principle constituent · CPC title
Selection of substances for gas fillings; Specified operating pressure or temperature · CPC title
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