Methods and apparatus for measuring edge ring temperature

Patent metadata

Field	Value
Publication number	US-2022246453-A1
Application number	US-202217728461-A
Country	US
Kind code	A1
Filing date	Apr 25, 2022
Priority date	Dec 9, 2019
Publication date	Aug 4, 2022
Grant date	—

Abstract

An apparatus for measuring a temperature of an assembly that is internal to a process chamber. The apparatus may include a light pipe positioned between a lamp radiation filtering window and the assembly, the light pipe has a first end with a bevel configured to redirect infrared radiation emitted from the assembly through the light pipe and has a second end distal to the first end, an optical assembly configured to collimate, filter, and focus infrared radiation from the second end of the light pipe, an optical detector configured to receive an output from the optical assembly and generate at least one signal representative of the infrared radiation, a temperature circuit that transforms the at least one signal into a temperature value, and a controller that is configured to receive the temperature value and to make adjustments to other process parameters of process chamber based on the temperature value.

First claim

1 . An apparatus for measuring a temperature internal to a process chamber, comprising:
a lamp radiation filtering window configured to be positioned between a lamp radiation source and a light pipe, wherein the lamp radiation filtering window, the lamp radiation source, and the light pipe are internal to the process chamber; the light pipe having a first end with a bevel configured to redirect infrared radiation through the light pipe and having a second end distal to the first end; an optical assembly configured to collimate, filter, and focus the infrared radiation from the second end of the light pipe; an optical detector configured to receive an output from the optical assembly and to generate at least one signal representative of the infrared radiation; and a temperature circuit that transforms the at least one signal into a temperature value.

2 . The apparatus of claim 1 , wherein the lamp radiation filtering window is made of a wet quartz material that absorbs radiation with a wavelength of approximately 2.7 microns to approximately 2.8 microns.

3 . The apparatus of claim 2 , wherein the wet quartz has an OH content of approximately 1000 parts per million (ppm) to approximately 1200 ppm.

4 . The apparatus of claim 1 , wherein the light pipe is made of a sapphire material.

5 . The apparatus of claim 1 , wherein the bevel has an angle of approximately 45 degrees.

6 . The apparatus of claim 1 , further comprising:
a sheath configured to enclose the light pipe while providing an opening at the first end of the light pipe that is configured to allow infrared radiation into the light pipe, the sheath is configured with a purge channel that is configured to surround the light pipe and flow a purge gas to reduce contamination of the light pipe.

7 . The apparatus of claim 1 , further comprising:
a housing with liquid cooling channels that surrounds at least part of the light pipe and the optical assembly and configured to flow coolant to reduce background thermal emission.

8 . The apparatus of claim 1 , wherein the optical assembly includes a first aspherical condenser lens, an optical bandpass filter, and a second aspherical condenser lens.

9 . The apparatus of claim 8 , wherein the optical assembly further includes a germanium lens with antireflective coating intervening between the first aspherical condenser lens and the second aspherical condenser lens.

10 . An apparatus for measuring a temperature internal to a process chamber, comprising:
a light pipe configured to be positioned internally in the process chamber with a lamp radiation filtering window internal to the process chamber positioned between the light pipe and a lamp radiation source internal to the process chamber, the light pipe having a first end with a bevel configured to redirect infrared radiation through the light pipe and having a second end distal to the first end; an optical assembly configured to collimate, filter, and focus the infrared radiation from the second end of the light pipe; an optical detector configured to receive an output from the optical assembly and to generate at least one signal representative of the infrared radiation; and a temperature circuit that transforms the at least one signal into a temperature value.

11 . The apparatus of claim 10 , wherein light pipe is configured to detect radiation with a wavelength of approximately 2.7 microns to approximately 2.8 microns.

12 . The apparatus of claim 10 , wherein the light pipe is made of a sapphire material.

13 . The apparatus of claim 10 , wherein the light pipe has a diameter of approximately 2 millimeters.

14 . The apparatus of claim 10 , wherein the bevel has an angle of approximately 45 degrees.

15 . The apparatus of claim 10 , further comprising:
a sheath configured to enclose the light pipe while providing an opening at the first end of the light pipe that is configured to allow infrared radiation into the light pipe.

16 . The apparatus of claim 15 , wherein the sheath is configured with a purge channel that is configured to surround the light pipe and flow a purge gas to reduce contamination of the light pipe.

17 . The apparatus of claim 16 , further comprising:
a housing that surrounds at least part of the light pipe and optical assembly, the housing having liquid cooling channels to flow coolant to reduce background thermal noise.

18 . The apparatus of claim 10 , wherein the optical assembly includes a first aspherical condenser lens, an optical bandpass filter, and a second aspherical condenser lens.

19 . The apparatus of claim 18 , wherein the optical assembly further includes a germanium filter with antireflective coating.

20 . An apparatus for measuring a temperature internal to a process chamber, comprising:
a light pipe configured to be positioned internally in the process chamber with a lamp radiation filtering window internal to the process chamber positioned between the light pipe and a lamp radiation source internal to the process chamber, the light pipe having a first end with a bevel configured to redirect infrared radiation through the light pipe and having a second end distal to the first end; an optical assembly configured to collimate, filter, and focus the infrared radiation from the second end of the light pipe; an optical detector configured to receive an output from the optical assembly and to generate at least one signal representative of the infrared radiation; a temperature circuit that transforms the at least one signal into a temperature value; and a controller that is configured to receive the temperature value and to adjust one or more processes of the process chamber based on the temperature value.

Assignees

• Applied Materials Inc

Inventors

• Hu Ji-Dih
• Aderhold Wolfgang R
• Iu Dongming

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0602 Primary

  Temperature monitoring · CPC title

• H10P72/7606

  characterised by edge clamping, e.g. clamping ring · CPC title

• G01J5/0818

  Waveguides · CPC title

• G01J5/0007 Primary

  of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing · CPC title