Fluid discharge device
US-10932372-B2 · Feb 23, 2021 · US
US2022193805A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2022193805-A1 |
| Application number | US-202217690096-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 9, 2022 |
| Priority date | May 13, 2019 |
| Publication date | Jun 23, 2022 |
| Grant date | — |
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An injection apparatus for injection material is disclosed. The injection apparatus includes a tank for storing material. The injection apparatus further includes a head body that has a surface for contacting a substrate and an opening part opened at the surface for discharging the material in fluid-communication with the tank. The injection apparatus further includes a member connected to the opening part, in which the member allows gas to flow into and flow out from the opening part.
Opening claim text (preview).
What is claimed is: 1 . A method for injecting material, comprising: placing an injection apparatus onto a substrate, the injection apparatus comprising a first tank for storing a material, the first tank including a first valve; a second tank in fluid communication with the first tank, the second tank including a second valve; and a head body having a surface in contact with the substrate and an opening part opened at the surface; wherein the second valve enables gas to flow therethrough; discharging the material from the opening part; and transferring the material filled in the opening part to the tank of the injection apparatus while taking gas into the opening part through the at least one member. 2 . The method of claim 1 , wherein the opening part has a form of a slit. 3 . The method of claim 1 , wherein the head body is disposed under the first and second tanks. 4 . The method of claim 1 , wherein the second tank is in fluid communication with the first tank via a single flow channel. 5 . The method of claim 4 , wherein the head body is horizontally aligned with the single flow channel. 6 . The method of claim 4 , wherein the single flow channel of the head body includes a first connection channel connected to the first tank and a second connection channel connected to the second tank. 7 . The method of claim 6 , wherein the opening part has a first end connected to the first connection channel and a second end connected to the second connection channel. 8 . The method of claim 1 , wherein the first valve of the first tank is opened or closed and connected to ambient environment, a positive pressure line or a vacuum line depending on an operation status. 9 . The method of claim 1 , wherein the injection apparatus is scanned on the substrate with the opening part covered by the substrate and filled with the material. 10 . The method of claim 1 , wherein the injection apparatus is lifted up from the substrate in response to transfer of the material from the opening part to the first tank. 11 . A method for injecting material, comprising: placing an injection apparatus onto a substrate, the injection apparatus comprising at least one tank for storing a material; and a head body having a surface in contact with the substrate and an opening part opened at the surface and covered by the substrate; discharging the material from the opening part; and transferring the material filled in the opening part to the tank of the injection apparatus while taking gas into the opening part through the at least one member. 12 . The method of claim 11 , wherein the at least one tank includes a first tank and a second tank. 13 . The method of claim 12 , wherein the first tank includes a first valve and the second tank includes a second valve. 14 . The method of claim 13 , wherein the second tank is in fluid communication with the first tank via a single flow channel 15 . The method of claim 14 , wherein the head body is horizontally aligned with the single flow channel. 16 . The method of claim 15 , wherein the head body is disposed under the first and second tanks. 17 . The method of claim 14 , wherein the single flow channel of the head body includes a first connection channel connected to the first tank and a second connection channel connected to the second tank. 18 . The method of claim 17 , wherein the opening part has a first end connected to the first connection channel and a second end connected to the second connection channel. 19 . The method of claim 18 , wherein the injection apparatus is scanned on the substrate with the opening part covered by the substrate and filled with the material. 20 . The method of claim 19 , wherein the injection apparatus is lifted up from the substrate in response to transfer of the material from the opening part to the first tank.
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