Gas diffuser mounting plate for reduced particle generation

Patent metadata

Field	Value
Publication number	US-2020165726-A1
Application number	US-201816201755-A
Country	US
Kind code	A1
Filing date	Nov 27, 2018
Priority date	Nov 27, 2018
Publication date	May 28, 2020
Grant date	—

Abstract

Embodiments of the present disclosure generally provide apparatus and methods for a gas diffuser assembly for a vacuum chamber, the gas diffuser assembly comprising a mounting plate, the mounting plate comprising a hub, a plurality of curved spokes extending from the hub in a radial direction, a gusset portion coupled between the hub and each of the curved spokes, each of the gusset portions having a convex curve disposed in an axial direction, and one or more mounting holes coupled to the curved spokes.

First claim

1 . A gas diffuser assembly for a vacuum chamber, the gas diffuser assembly comprising:
a mounting plate, the mounting plate comprising:
a hub;
a plurality of curved spokes extending from the hub in a radial direction;
a gusset portion coupled between the hub and each of the curved spokes, each of the gusset portions having a convex curve disposed in an axial direction; and
one or more mounting holes positioned adjacent to the curved spokes.

2 . The gas diffuser assembly of claim 1 , wherein each of the mounting holes are formed in a circular mounting structure between the curved spokes.

3 . The gas diffuser assembly of claim 1 , wherein one of the one or more mounting holes are positioned at a distal end of each of the curved spokes.

4 . The gas diffuser assembly of claim 1 , wherein each of the curved spokes includes a distal body.

5 . The gas diffuser assembly of claim 4 , wherein each of the curved spokes includes an acute angled portion and an obtuse angled portion at the distal body.

6 . The gas diffuser assembly of claim 1 , wherein each of the curved spokes includes an acute angled portion and an obtuse angled portion.

7 . The gas diffuser assembly of claim 1 , wherein the hub includes a flat surface.

8 . The gas diffuser assembly of claim 1 , wherein the hub includes a rounded surface.

9 . The gas diffuser assembly of claim 1 , wherein a gusset portion is positioned between the hub and the each of the curved spokes.

10 . A gas diffuser assembly for a vacuum chamber, the gas diffuser assembly comprising:
a mounting plate, the mounting plate comprising:
a hub;
a plurality of spokes extending from the hub in a radial direction;
a gusset portion coupled between the hub and each of the spokes, each of the gusset portions having a convex curve disposed in an axial direction;
one or more mounting holes positioned adjacent to the spokes; and
a threaded hole formed in the hub.

11 . The gas diffuser assembly of claim 10 , wherein each of the mounting holes are formed in a circular mounting structure between the spokes.

12 . The gas diffuser assembly of claim 10 , wherein one of the one or more mounting holes positioned at a distal end of each of the spokes.

13 . The gas diffuser assembly of claim 10 , wherein each of the spokes includes a distal body.

14 . The gas diffuser assembly of claim 13 , wherein each of the spokes includes an acute angled portion and an obtuse angled portion at the distal body.

15 . The gas diffuser assembly of claim 10 , wherein each of the spokes includes an acute angled portion and an obtuse angled portion.

16 . The gas diffuser assembly of claim 10 , wherein the hub includes a flat surface.

17 . The gas diffuser assembly of claim 10 , wherein the hub includes a rounded surface.

18 . A gas diffuser assembly for a vacuum chamber, the gas diffuser assembly comprising:
a mounting plate; and a gas deflector coupled to the mounting plate by a single fastener, wherein the mounting plate comprises:
a hub;
a plurality of curved spokes extending from the hub in a radial direction; and
one or more mounting holes coupled to the curved spokes.

19 . The gas diffuser assembly of claim 18 , wherein the plurality of curved spokes are positioned at 90 degree intervals on the hub.

20 . The gas diffuser assembly of claim 18 , wherein each of the spokes includes a distal body and an acute angled portion and an obtuse angled portion.

Assignees

• Applied Materials Inc

Inventors

• Lau Allen K
• An Hsiang
• Zhao Lai
• Zhou Jianhua
• Tiner Robin L

Classifications

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/45563 Primary

  Gas nozzles · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• C23C16/505

  using radio frequency discharges · CPC title