Electrostatic substrate holder

Patent metadata

Field	Value
Publication number	US-2019355606-A1
Application number	US-201716482316-A
Country	US
Kind code	A1
Filing date	Mar 9, 2017
Priority date	Mar 9, 2017
Publication date	Nov 21, 2019
Grant date	—

Abstract

An electrostatic substrate holder for accommodating and holding a substrate, a method for processing a substrate, and a processing plant. The electrostatic substrate holder includes a stator having electrodes that generate an electrostatic holding force for fixing the substrate.

First claim

1 - 17 . (canceled)

18 . An electrostatic substrate holder for accommodating and holding a substrate, said electrostatic substrate holder comprising:
a rotor having a holder for fixing the substrate on a holding surface, a stator for accommodating and bearing the rotor, electrodes for generating an electrostatic holding force for fixing the substrate, wherein the stator has the electrodes, whereby the electrodes are separated from the holding surface, and wherein the rotor is mounted by means of electrically conductive bearing elements, the electrically conductive bearing elements contacting the electrodes of the stator.

19 . The electrostatic substrate holder according to claim 18 , wherein the rotor is mounted by means of:
ball bearings and/or deep groove ball bearings and/or angular contact ball bearings and/or spherical roller bearings and/or axial bearings and/or radiax bearings.

20 . The electrostatic substrate holder according to claim 18 , wherein the thickness of the holder in the Z direction is less than 100 mm.

21 . The electrostatic substrate holder according to claim 18 , wherein the distance between the electrodes and the holding surface is less than 100 millimetres.

22 . The electrostatic substrate holder according to claim 18 , wherein the electrostatic substrate holder includes depressions arranged on a side of the holder facing away from the substrate, said electrodes arranged in the depressions, wherein the depressions are constructed concentrically and/or as channels.

23 . The electrostatic substrate holder according to claim 18 , wherein the electrodes are constructed as rings.

24 . The electrostatic substrate holder according to claim 23 , wherein the rings are arranged in an equidistant and/or concentric manner.

25 . The electrostatic substrate holder according to claim 18 , wherein the electrodes are constructed as circle segments, and/or circular ring sectors.

26 . The electrostatic substrate holder according to claim 18 , wherein the holder is formed as a honeycomb structure.

27 . The electrostatic substrate holder according to claim 18 , wherein the electrostatic substrate holder includes a positioning, holding and moving system for moving the substrate and/or the holder.

28 . The electrostatic substrate holder according to claim 18 , wherein the substrate and/or the holder are movable in at least three degrees of freedom.

29 . The electrostatic substrate holder according to claim 28 , wherein a substrate and/or the holder are movable in all six degrees of freedom.

30 . The electrostatic substrate holder according to claim 27 , wherein the positioning, holding and movement system is constructed for at least one degree of freedom using a coarse drive and a fine drive.

31 . The electrostatic substrate holder according to claim 30 , wherein the coarse and fine drives of the positioning, holding and movement system are configured such that in a non-moved state without operating voltage and/or current and/or other power supply, the coarse and fine drives maintain the respective position and/or stop.

32 . The electrostatic substrate holder according to claim 18 wherein the electrostatic substrate holder includes:
a central control unit and/or a regulating unit for controlling and/or regulating movements and/or procedures.

33 . The electrostatic substrate holder according to claim 32 , wherein the central control unit and/or the regulating unit is for the fixing of the substrate, the position of the holder, the speeds, and/or the accelerations of the holder.

34 . The electrostatic substrate holder according to claim 18 , wherein the electrostatic substrate holder includes:
at least one sensor for measuring influencing factors, and at least one actuator for controlling and/or regulating as a function of the measured influencing factors.

35 . The electrostatic substrate holder according to claim 34 , wherein the at least one sensor includes a distance and/or a position sensor.

36 . The electrostatic substrate holder according to claim 34 , wherein the at least one actuator includes a position encoder and/or an angle encoder.

37 . A processing plant, having a processing apparatus for processing a substrate and an electrostatic substrate holder for holding the substrate according to claim 18 .

38 . A method for processing a substrate, wherein the substrate is held and rotated by means of an electrostatic substrate holder according to claim 18 .

Assignees

• Ev Group E Thallner Gmbh

Inventors

• Flotgen Christoph

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/72 Primary

  using electrostatic chucks · CPC title

• H01L21/6838

  Electricity · mapped topic

• H01L21/67248

  Electricity · mapped topic