X-ray diffraction apparatus

Patent metadata

Field	Value
Publication number	US-2019293575-A1
Application number	US-201916357613-A
Country	US
Kind code	A1
Filing date	Mar 19, 2019
Priority date	Mar 20, 2018
Publication date	Sep 26, 2019
Grant date	—

Abstract

An X-ray diffraction apparatus includes: an X-ray source ( 110 ); a first incident path letting the generated X-ray beam pass therethrough; a second incident path letting the generated X-ray beam be reflected by a multilayer film mirror and letting the reflected X-ray beam pass therethrough in parallel with the X-ray beam having passed through the first incident path. A movement mechanism is provided moving the X-ray source ( 110 ) between the first incident path and the second incident path while preserving respective relative positions thereof. An incident slit ( 160 ) allows an X-ray beam to be incident on a sample S pass therethrough; and a sample support stage ( 165 ) supports the sample S at a position fixed relative to the incident slit ( 160 ).

First claim

1 . An X-ray diffraction apparatus comprising:
an X-ray source configured to generate an X-ray beam; a first incident path configured to let the X-ray beam pass therethrough with a predetermined divergence angle; a second incident path configured to let the X-ray beam be reflected by a multilayer film mirror and let the X-ray beam after reflection to pass therethrough in parallel with the X-ray beam having passed through the first incident path; a movement mechanism configured to move the X-ray source, the first incident path, and the second incident path in a predetermined direction while preserving respective relative positions thereof; an incident slit configured to let the X-ray beam to be incident on a sample pass therethrough; and a sample support stage configured to support the sample at a position fixed relative to the incident slit, wherein the movement mechanism switches the X-ray beam to be passed through the incident slit between the X-ray beam having passed through the first incident path or alternatively the second incident path.

2 . The X-ray diffraction apparatus according to claim 1 further comprising,
the first incident path is formed of a first aperture configured to narrow the generated X-ray beam to a predetermined divergence angle, and a first selection slit configured to select the X-ray beam having passed through the first aperture, and
the second incident path is formed of a second aperture configured to narrow the X-ray beam toward the multilayer film mirror, the multilayer film mirror and a second selection slit configured to select the X-ray beam having been reflected by the multilayer film mirror.

3 . The X-ray diffraction apparatus according to claim 1 further comprising, the multilayer film mirror is configured to shape the generated X-ray beam into a parallel beam, a focused beam, or a diverging beam.

4 . The X-ray diffraction apparatus according to claim 1 further comprising, a collimator holder configured to hold a collimator that narrows the X-ray beam having passed through the incident slit at a fixed orientation relative to the incident slit.

5 . The X-ray diffraction apparatus according to claim 1 further comprising, the movement mechanism has a motorized axle configured to move the X-ray source, the first incident path, and the second incident path upon receiving an instruction to switch the X-ray beam to be passed through the incident slit.

Assignees

• Rigaku Denki Co Ltd

Inventors

• Osakabe Takeshi
• Mitsunaga Toru

Classifications

• G01N23/20008 Primary

  Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor (monochromators for X- rays using crystals G21K1/06) · CPC title

• G01N2223/3305

  detector fixed; source and body moving · CPC title

• G01N23/207 Primary

  Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions · CPC title

• G01N23/20016

  Goniometers · CPC title

• G21K1/062

  Devices having a multilayer structure · CPC title