Sample for measuring particles, method for measuring particles and apparatus for measuring particles

Patent metadata

Field	Value
Publication number	US-2019178640-A1
Application number	US-201616325590-A
Country	US
Kind code	A1
Filing date	Aug 31, 2016
Priority date	Aug 31, 2016
Publication date	Jun 13, 2019
Grant date	—

Abstract

To provide a sample for measuring particles enabling the three-dimensional particulate shape to be measured and the particulate species to be evaluated, the sample for measuring particles includes a substrate; isolated nanoparticles to be measured which are disposed on the substrate; and isolated standard nanoparticles which are disposed on the substrate in the vicinity of the isolated nanoparticles to be measured.

First claim

1 . An apparatus for measuring particles comprising:
a scanning probe or a charged particle beam probe; and a substrate on which isolated nanoparticles to be measured are disposed and isolated standard nanoparticles are disposed in a vicinity of the isolated nanoparticles to be measured.

2 . The apparatus for measuring particles according to claim 1 ,
wherein the vicinity is within a range as the isolated nanoparticles to be measured and the isolated standard nanoparticles being disposed within 50 μm in square from one another.

3 . The apparatus for measuring particles according to claim 1 ,
wherein the vicinity refers to a state in which the isolated nanoparticles to be measured and the isolated standard nanoparticles are disposed adjacently to one another on a same measuring scanning line of one of the scanning probe and the charged particle beam probe.

4 . The apparatus for measuring particles according to claim 1 ,
wherein a surface of the substrate is that of a surface decorated substrate in which the surface is decorated with a functional group having chemical or physical interaction with the surface.

5 . The apparatus for measuring particles according to claim 4 ,
wherein the surface decorated substrate is provided with a plurality of areas which is decorated with a plurality of functional groups.

6 . The apparatus for measuring particles according to claim 1 ,
wherein three-dimensional shapes of the isolated nanoparticles to be measured are rectified with measuring results of the isolated standard nanoparticles disposed in the vicinity of the isolated nanoparticles to be measured in use.

7 . A method for measuring particles comprising:
a first step of preparing a substrate on which isolated nanoparticles to be measured are disposed and isolated standard nanoparticles are disposed in a vicinity of the isolated nanoparticles to be measured; a second step of measuring the isolated nanoparticles to be measured and the isolated standard nanoparticles which are disposed on the substrate employing a scanning probe or a charged particle beam probe; a third step of deriving a shape of the scanning probe or a beam profile of the charged particle beam probe from results of the isolated standard nanoparticles measured at the second step; and a fourth step of rectifying three-dimensional shapes of the isolated nanoparticles to be measured employing the shape of the scanning probe or the beam profile of the charged particle beam probe.

8 . The method for measuring particles according to claim 7 ,
wherein a surface of the substrate is a surface decorated substrate in which the surface is decorated with a functional group having chemical or physical interaction with the surface.

9 . The method for measuring particles according to claim 7 ,
wherein the second step further includes a step of simultaneously measuring information on particulate shapes and information on physical properties.

10 . The method for measuring particles according to claim 9 ,
wherein the information on particulate shapes include height, aspect ratio, circularity, asperity or phase roughness while the information on physical properties includes viscosity, friction force, electric current or magnetic force.

11 . The method for measuring particles according to claim 10 ,
wherein a discrimination step of discriminating the isolated standard nanoparticles from the isolated nanoparticles to be measured further intervenes between the second and third steps; and the discrimination step includes a step of discriminating the isolated standard nanoparticles from the isolated nanoparticles to be measured employing the information on particulate shapes or the information on physical properties.

12 . A sample for measuring particles comprising:
a substrate; isolated nanoparticles to be measured which are disposed on the substrate; and isolated standard nanoparticles which are disposed on the substrate in a vicinity of the isolated nanoparticles to be measured.

13 . The sample for measuring particles according to claim 12 ,
wherein the vicinity refers to a state in which the isolated nanoparticles and the isolated standard nanoparticles are adjoining to one another.

14 . The sample for measuring particles according to claim 12 ,
wherein a surface of the substrate is a surface decorated substrate in which the surface is decorated with a functional group having chemical or physical interaction with the surface.

15 . The sample for measuring particles according to claim 14 ,
wherein the surface decorated substrate is provided with a plurality of areas which is decorated with a plurality of functional groups.

Assignees

• Hitachi High Tech Corp

Inventors

• Hashizume Tomihiro
• Yasutake Masatoshi
• NAGATA Sanato

Classifications

• G01Q30/06 Primary

  for error compensation · CPC title

• G01N23/225

  using electron or ion · CPC title

• G01N15/02

  Investigating particle size or size distribution (by measuring osmotic pressure G01N7/10; investigating sedimentation of particle suspensions G01N15/04; investigating individual particles G01N15/10) · CPC title

• G01N15/06

  Investigating concentration of particle suspensions (by weighing G01N5/00; investigating sedimentation of particle suspensions G01N15/04; investigating individual particles G01N15/10) · CPC title

• G01B15/08 Primary

  for measuring roughness or irregularity of surfaces · CPC title