Atomic force microscopy of scanning and image processing

Patent metadata

Field	Value
Publication number	US-10126326-B2
Application number	US-201514873839-A
Country	US
Kind code	B2
Filing date	Oct 2, 2015
Priority date	Apr 28, 2006
Publication date	Nov 13, 2018
Grant date	Nov 13, 2018

Abstract

Apparatus and associated method that contemplates performing a first atomic force microscope (AFM) scan of a first region of a sample centered at a first position at a first angle to produce a first scan image, the first AFM scan including a first component scan at a first speed and a second component scan at a second speed; performing a second AFM scan of the first region of the sample at a second angle to produce a second scan image, the second AFM scan including performing a third component scan at the first speed and a fourth component scan at the second speed; and correcting a first error in the first scan image based on the second scan image to produce a corrected image output.

First claim

What is claimed:

1. A method comprising:
performing a first atomic force microscope (AFM) scan of a first region of a sample centered at a first position at a first angle to produce a first scan image, the first AFM scan including a first component scan at a first speed and a second component scan at a different second speed;
performing a second AFM scan of the first region of the sample at a different second angle to produce a second scan image, the second AFM scan including performing a third component scan at the first speed and a fourth component scan at the second speed; and
correcting a first error in the first scan image based on the second scan image to produce a corrected image output.

2. The method of claim 1 , further comprising:
the second angle is substantially perpendicular to the first angle; and
the first error is caused by drift during the first AFM scan.

3. The method of claim 1 further comprising:
performing a reference AFM scan of a second region of the sample centered at a second position offset from the first position to produce a third scan image, wherein the second region includes a portion of the sample that has a substantially level surface; and
correcting a bowing error in the first scan image based on the third scan image using image subtraction.

4. The method of claim 3 further comprising:
performing a third AFM scan of a third region of the sample centered at a third position at a different third angle to produce a fourth scan image, wherein the third region is within an area of the first region and an area of the third region is smaller than the area of the first region; and
correcting a slope error in the fourth scan image based on the first scan image.

5. The method of claim 4 further comprising:
performing a fourth AFM scan of the third region of the sample centered at the third position at a fourth angle perpendicular to the third angle to produce a fifth scan image; and
correcting a drift error in the fourth scan image based on the fifth scan image.

Assignees

• Seagate Technology Llc

Inventors

• Zhou Lin
• Liu Huiwen
• Egbert Dale
• Nelson Jonathan A
• Zhu Jianxin

Classifications

• B82Y35/00

  Methods or apparatus for measurement or analysis of nanostructures · CPC title

• G01Q40/00 Primary

  Calibration, e.g. of probes · CPC title

• G01Q30/06

  for error compensation · CPC title