X-ray diffractometer

Patent metadata

Field	Value
Publication number	US-2017191950-A1
Application number	US-201515312881-A
Country	US
Kind code	A1
Filing date	Jan 14, 2015
Priority date	Jun 5, 2014
Publication date	Jul 6, 2017
Grant date	—

Abstract

Only X-rays having a specific wavelength out of focusing X-rays 2 diffracted from a sample S is reflected from a monochromator 60 based on a Bragg's condition, passed through a receiving slit 30 and detected by an X-ray detector 20 . The monochromator 60 is configured to be freely removable, and arranged between the sample S and a focal point 2 a at which the focusing X-rays 2 diffracted from the sample S are directly focused. At this time, the monochromator 60 is approached to the focal point 2 a as closely as possible. The monochromator 60 comprises a multilayer mirror having an internal interplanar spacing which varies continuously from one end to the other end.

First claim

1 . An X-ray diffractometer comprising:
an X-ray source for irradiating a sample with X-rays; a reflection type monochromator for receiving focusing X-rays diffracted from a sample and reflecting only focusing X-rays having a specific wavelength based on a Bragg's condition; an X-ray detector for detecting focusing X-rays monochromated by the monochromator; and a unit that adjusts measurement resolution of the X-ray detector, wherein the monochromator is arranged on an X-ray optical path between a focal point at which the focusing X-rays from the sample are directly focused and the sample.

2 . The X-ray diffractometer according to claim 1 , wherein the monochromator comprises a multilayer mirror having an internal interplanar spacing that varies continuously from one end to the other end.

3 . The X-ray diffractometer according to claim 2 , wherein the monochromator has an incident face for the focusing X-rays, the incident face being configured to be a flat surface.

4 . The X-ray diffractometer according to claim 2 , wherein the interplanar spacing in the multilayer mirror is adjusted so that a interplanar spacing d 1 in a depth direction at a site to which the focusing X-rays are incident at an incident angle θ 1 and a interplanar spacing d 2 in the depth direction at a site to which the focusing X-rays are incident at an incident angle θ 2 satisfy the following equation based on the Bragg's condition: 2d 1 ×sin θ 1 =2d 2 ×sin θ 2 =nλ, wherein λ represents the wavelength of the diffracted X-rays, and n represents an integer.

5 . The X-ray diffractometer according to claim 1 , wherein the monochromator is arranged in proximity to a focal point at which the focusing X-rays diffracted from the sample are directly focused to the extent that the monochromator does not interfere with the X-ray detector.

6 . The X-ray diffractometer according to claim 5 , wherein the unit that adjusts the measurement resolution of the X-ray detector comprises a receiving slit arranged in front of an X-ray detection face in the X-ray detector.

7 . The X-ray diffractometer according to claim 6 , wherein the X-ray detector comprises a two-dimensional X-ray detector that is adapted to two-dimensionally detect X-rays incident to the X-ray detection face.

8 . The X-ray diffractometer according to claim 6 , wherein the monochromator is removable from the optical path of the focusing X-rays diffracted from the sample;
the X-ray detection face of the X-ray detector has an area that allows detection of focusing X-rays diffracted from the sample in an X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays and detection of focusing X-rays that are diffracted from the sample and reflected from the monochromator in an X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays; and the receiving slit is configured to be freely positionally changeable between a position through which the focusing X-rays diffracted from the sample pass in the X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays, and a position through which the focusing X-rays diffracted from the sample and reflected from the monochromator pass in the X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays.

9 . The X-ray diffractometer according to claim 6 , wherein the monochromator is removable from the optical path of the focusing X-rays diffracted from the sample;
the receiving slit is configured to be freely positionally changeable between a position through which the focusing X-rays diffracted from the sample pass in an X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays, and a position through which the focusing X-rays diffracted from the sample and reflected from the monochromator pass in an X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays; and the X-ray detector is configured to be freely positionally changeable between a detection position of the focusing X-rays diffracted from the sample and passing through the receiving slit in the X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays, and a detection position of the focusing X-rays diffracted from the sample, reflected from the monochromator and passing through the receiving slit in the X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays.

10 . The X-ray diffractometer according to claim 5 , wherein the monochromator is removable from the optical path of the focusing X-rays diffracted from the sample;
the X-ray detector comprises a two-dimensional X-ray detector that is adaptable to two-dimensionally detect X-rays incident to the X-ray detection face;
the X-ray detection face of the X-ray detector has an area that allows detection of focusing X-rays diffracted from the sample in an X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays and detection of focusing X-rays that are diffracted from the sample and reflected from the monochromator in an X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays;
the X-ray detector has a function of freely changing an X-ray detection area between a first X-ray detection area for detecting focusing X-rays diffracted from the sample in the X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays, and a second X-ray detection area for detecting focusing X-rays diffracted from the sample and reflected from the monochromator in the X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays; and the function of freely changing the X-ray detection area in the X-ray detector constitutes a unit that adjusts measurement resolution of the X-ray detector.

11 . The X-ray diffractometer according to claim 7 , wherein the two-dimensional X-ray detector is configured to have a two-dimensional X-ray detection function capable of two-dimensionally detecting X-rays incident to the X-ray detection face, a one-dimensional X-ray detection function capable of one-dimensionally detecting X-rays incident to the X-ray detection face and a zero-dimensional X-ray detection function capable of zero-dimensionally detecting X-rays incident to the X-ray detection face, the two-dimensional X-ray detection function, the one-dimensional X-ray detection function and the zero-dimensional X-ray detection function being switchable to one another.

12 . The X-ray diffractometer according to claim 10 , wherein the two-dimensional X-ray detector is configured to have a two-dimensional X-ray detection function capable of two-dimensionally detecting X-rays incident to the X-ray detection face, a one-dimensional X-ray detection function capable of one-dimensionally detecting X-rays incident to the X-ray detection face and a zero-dimensional X-ray detection function capable of zero-dimensionally detecting X-rays incident to the X-ray detection face, the two-dimensional X-ray detection function, the one-dimensional X-ray detection function and the zero-dimensional X-ray detection function being switchable to one another.

Assignees

• Rigaku Denki Co Ltd

Inventors

• Osakabe Takeshi
• Ozawa Tetsuya
• Omote Kazuhiko
• Jiang Licai
• Verman Boris
• Platonov Yuriy

Classifications

• G02B7/003

  Alignment of optical elements (G02B7/001, G02B7/002 take precedence; for mirrors G02B7/1822) · CPC title

• G01N23/20008 Primary

  Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor (monochromators for X- rays using crystals G21K1/06) · CPC title

• G01N2223/315

  monochromators · CPC title

• G01N23/207 Primary

  Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions · CPC title

• G21K1/04

  using variable diaphragms, shutters, choppers · CPC title