Microelectromechanical resonator with improved electrical features
US-2018339898-A1 · Nov 29, 2018 · US
US2017088414A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2017088414-A1 |
| Application number | US-201514865330-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 25, 2015 |
| Priority date | Sep 25, 2015 |
| Publication date | Mar 30, 2017 |
| Grant date | — |
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A method and apparatus for dissipating an electrostatic charge from an optical element are described. An apparatus includes the optical element, a microelectromechanical system (MEMS) device located proximate to the optical element, and a conductive coating over the optical element, wherein the conductive coating is substantially transparent, and wherein the conductive coating dissipates the electrostatic charge.
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What is claimed is: 1 . An apparatus for dissipating an electrostatic charge from an optical element, comprising: the optical element; a microelectromechanical system (MEMS) device located proximate to the optical element; and a conductive coating over the optical element, wherein the conductive coating is substantially transparent, and wherein the conductive coating dissipates the electrostatic charge. 2 . The apparatus of claim 1 , comprising an electrical coupling from the conductive coating to a ground connection. 3 . The apparatus of claim 1 , comprising a dichroic layer proximate to the conductive coating. 4 . The apparatus of claim 1 , wherein the conductive coating comprises a layer of indium-tin-oxide (ITO). 5 . The apparatus of claim 1 , wherein the conductive coating comprises a metal coating. 6 . The apparatus of claim 1 , wherein the conductive coating comprises a silver coating. 7 . A method for protecting a microelectromechanical system (MEMS) device from effects caused by an electrostatic charge on an optical element, comprising: applying a conductive coating to the optical element; and installing the optical element in a case proximate to the MEMS device. 8 . The method of claim 7 , comprising applying the conductive coating to a side of the optical element to be installed facing towards the MEMS device. 9 . The method of claim 7 , comprising applying the conductive coating to a side of the optical element to be installed facing away from the MEMS device. 10 . The method of claim 7 , comprising applying the conductive coating to both sides of the optical element. 11 . The method of claim 7 , comprising coupling the conductive coating to a ground connection. 12 . The method of claim 7 , comprising applying an optical coating to the optical element, wherein the optical coating is selected to decrease reflections from a surface of the optical element. 13 . The method of claim 7 , comprising sputtering a metal coating on the optical element as the conductive coating. 14 . A computing device comprising an optoelectronic device, wherein the optoelectronic device comprises: an optical element configured to allow light to pass from inside a case to outside the case; a microelectromechanical system (MEMS) device to control a mirror located proximate to the optical element; and a conductive coating over the optical element, wherein the conductive coating is substantially transparent, and wherein the conductive coating dissipates an electrostatic charge. 15 . The computing device of claim 14 , comprising a collimated light source directed at the mirror. 16 . The computing device of claim 14 , comprising a laser directed at the mirror. 17 . The computing device of claim 14 , comprising the conductive coating on a side of the optical element opposite the MEMS device. 18 . The computing device of claim 14 , comprising the conductive coating on a side of the optical element facing the MEMS device and on the side of the optical element opposite the MEMS device. 19 . The computing device of claim 14 , comprising an electrical coupling from the conductive coating to a ground connection. 20 . The computing device of claim 14 , comprising a dichroic layer proximate to the conductive coating. 21 . The computing device of claim 14 , comprising a dichroic layer on an opposite side of the optical element from the conductive coating. 22 . The computing device of claim 14 , wherein the conductive coating comprises a layer of indium-tin-oxide (ITO). 23 . The computing device of claim 14 , comprising a three-dimensional scanner comprising the MEMS device. 24 . The computing device of claim 14 , comprising an imaging device. 25 . The computing device of claim 24 , wherein the imaging device comprises a still shot camera, a three dimensional (3D) camera, or a video recording device, or any combinations thereof.
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Electricity · mapped topic
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