Heat treatment apparatus, regulation method of heat treatment apparatus, and program

Patent metadata

Field	Value
Publication number	US-2016363373-A1
Application number	US-201615172368-A
Country	US
Kind code	A1
Filing date	Jun 3, 2016
Priority date	Jun 10, 2015
Publication date	Dec 15, 2016
Grant date	—

Abstract

The controller receives information including a plurality of evaluation indexes, a weight of each evaluation index, the number of times for calculating a value of an evaluation function, and initial parameter values, and performs a simulation based on the received information. Then, the controller calculates a value of an evaluation function based on a result of the simulation, and determines whether the calculated value of the evaluation function is minimum, to update parameters when it is determined that the value of the evaluation function is minimum. In the calculation of a value of the evaluation function, a value of the evaluation function is calculated again based on the number of times for calculating a value of an evaluation function. The controller generates new parameters by a genetic algorithm when a value of an evaluation function is calculated again.

First claim

What is claimed is:

1 . A heat treatment apparatus comprising:
a receiving unit configured to receive information including a plurality of evaluation indexes, a weight of each evaluation index, the number of times for calculating a value of an evaluation function, and initial parameter values; a simulation performing unit configured to perform a simulation based on the information received by the receiving unit; an evaluation function value calculating unit configured to calculate a value of an evaluation function based on a result of the simulation performed by the simulation performing unit; and a parameter updating unit configured to determine whether the value of the evaluation function calculated by the evaluation function value calculating unit is minimum, to update parameters when it is determined that the value of the evaluation function is minimum, wherein the evaluation function value calculating unit calculates a value of the evaluation function again based on the number of times for calculating a value of an evaluation function received by the receiving unit, and the heat treatment apparatus further comprises a parameter generating unit configured to generate new parameters by a genetic algorithm when a value of the evaluation function is calculated again by the evaluation function value calculating unit.

2 . The heat treatment apparatus of claim 1 , wherein the evaluation indexes are, at least, a sum of errors from a target value and a sum of absolute values of differentiation of a power.

3 . The heat treatment apparatus of claim 1 , wherein the information received by the receiving unit includes threshold values of the evaluation indexes.

4 . A regulation method of a heat treatment apparatus, comprising:
a receiving process of receiving information including a plurality of evaluation indexes, a weight of each evaluation index, the number of times for calculating a value of an evaluation function, and initial parameter values; a simulation performing process of performing a simulation based on the information received by the receiving process; an evaluation function value calculating process of calculating a value of an evaluation function based on a result of the simulation performed by the simulation performing process; and a parameter updating process of determining whether the value of the evaluation function calculated by the evaluation function value calculating process is minimum, to update parameters when it is determined that the value of the evaluation function is minimum, wherein, in the evaluation function value calculating process, a value of the evaluation function is calculated again based on the number of times for calculating a value of an evaluation function received by the receiving process, and the regulation method further comprises a parameter generating process of generating new parameters by a genetic algorithm when a value of the evaluation function is calculated again by the evaluation function value calculating process.

5 . A non-transitory computer-readable storage medium which stores a program causing a computer to function as:
a receiving unit configured to receive information including a plurality of evaluation indexes, a weight of each evaluation index, the number of times for calculating a value of an evaluation function, and initial parameter values; a simulation performing unit configured to perform a simulation based on the information received by the receiving unit; an evaluation function value calculating unit configured to calculate a value of an evaluation function based on a result of the simulation performed by the simulation performing unit; and a parameter updating unit configured to determine whether the value of the evaluation function calculated by the evaluation function value calculating unit is minimum, to update parameters when it is determined that the value of the evaluation function is minimum, wherein the evaluation function value calculating unit calculates a value of the evaluation function again based on the number of times for calculating a value of an evaluation function received by the receiving unit, and the program further causes the computer to function as a parameter generating unit configured to generate new parameters by a genetic algorithm when a value of the evaluation function is calculated again by the evaluation function value calculating unit.

Assignees

• Tokyo Electron Ltd

Inventors

• Noda Yuto
• Yamaguchi Tatsuya
• Masunaga Masayoshi
• Yoshii Koji

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0434

  mainly by convection · CPC title

• F27D2019/0096

  involving simulation means, e.g. of the treating or charging step · CPC title

• F27B1/10

  Details, accessories or equipment specially adapted for furnaces of these types · CPC title

• F27B17/0025

  specially adapted for treating semiconductor wafers · CPC title