Edge Crack Detection System

Patent metadata

Field	Value
Publication number	US-2016356846-A1
Application number	US-201615244142-A
Country	US
Kind code	A1
Filing date	Aug 23, 2016
Priority date	May 28, 2014
Publication date	Dec 8, 2016
Grant date	—

Abstract

According to an exemplary embodiment, a method of detecting edge cracks in a die under test is provided. The method includes the following operations: receiving a command signal; providing power from the command signal; providing a response signal based on the command signal; and self-destructing based on the command signal.

First claim

What is claimed is:

1 . A method of detecting edge cracks in a die under test, comprising:
encircling a die under test with an antenna of a radio frequency identification (RFID) tag, the antenna being disposed outside of a seal ring of the die under test; receiving a first command signal at the RFID tag; based on the first command signal, transmitting a response signal using the RFID tag; receiving a second command signal at the RFID tag after the transmitting of the response signal; and self-destructing the RFID tag based on the second command signal.

2 . The method of claim 1 , further comprising disposing a processor of the RFID tag under the seal ring of the die under test.

3 . The method of claim 1 , wherein the antenna completely encircles the die under test, and the seal ring surrounds an entire periphery of the die under test.

4 . The method of claim 1 , further comprising determining whether to perform the self-destructing of the RFID tag based on a comparison of the second command signal to a lookup table.

5 . The method of claim 1 , wherein the response signal is transmitted as an electromagnetic wave.

6 . The method of claim 1 , further comprising discontinuing the transmitting of the response signal after the self-destructing of the RFID tag.

7 . A method of detecting edge cracks in a die under test, comprising:
transmitting a first command signal to a radio frequency identification (RFID) tag, the RFID tag including an antenna that encircles a die under test; receiving a response signal from the RFID tag; and transmitting a second command signal to the RFID tag based on the response signal, the second command signal comprising an indication that commands the RFID tag to perform a self-destruction process.

8 . The method of claim 7 , further comprising determining that the die under test has no edge cracks based on the receiving of the response signal from the RFID tag.

9 . The method of claim 7 , wherein the first command signal is transmitted as an electromagnetic wave.

10 . An edge crack detection system comprising:
a die under test; and a radio frequency identification (RFID) tag comprising an antenna that completely encircles the die under test, the RFID tag being configured to
receive a first command signal via the antenna,
based on the first command signal, transmit a response signal,
receive a second command signal after the transmitting of the response signal, and
self-destruct based on the second command signal.

11 . The edge crack detection system of claim 10 , wherein the antenna is disposed outside of a seal ring of the die under test.

12 . The edge crack detection system of claim 11 , wherein the RFID tag comprises a processor disposed under the seal ring.

13 . The edge crack detection system of claim 11 , wherein the seal ring surrounds an entire periphery of the die under test.

14 . The edge crack detection system of claim 10 , wherein
the RFID tag is configured to wirelessly connect to an RFID reader, the RFID tag is configured to receive the first and second command signals from the RFID reader, and the RFID tag is configured to transmit the response signal to the RFID reader.

15 . The edge crack detection system of claim 10 , wherein the RFID tag is configured to determine whether to perform the self-destructing based on a comparison of the second command signal to a lookup table.

16 . The edge crack detection system of claim 10 , wherein the RFID tag is configured to transmit the response signal as an electromagnetic wave.

17 . The edge crack detection system of claim 10 , wherein the RFID tag is configured to discontinue the transmitting of the response signal after the self-destructing.

18 . An edge crack detection system comprising:
a radio frequency identification (RFID) reader configured to
connect wirelessly to an RFID tag,
transmit a first command signal to the RFID tag, the RFID tag including
an antenna that encircles a die under test,
receive a response signal from the RFID tag, and
transmit a second command signal to the RFID tag based on the response signal, the second command signal comprising an indication that commands the RFID tag to perform a self-destruction process.

19 . The edge crack detection system of claim 18 , wherein the RFID reader is configured to determine that the die under test has no edge cracks based on the receiving of the response signal from the RFID tag.

20 . The edge crack detection system of claim 18 , wherein the RFID reader is configured to transmit the first command signal as an electromagnetic wave.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Hsiao Huang-Ting
• Xu An-Tai
• Tsao Pei-Haw
• Tsai Cheng-Hung
• Chen Tsui-Mei
• Lu Nai-Cheng

Classifications

• H10P74/277

  Circuits for electrically characterising or monitoring manufacturing processes, e.g. circuits in tested chips or circuits in testing wafers · CPC title

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title

• G06K19/0722 Primary

  comprising an arrangement for testing the record carrier · CPC title

• G06K7/10366

  the interrogation device being adapted for miscellaneous applications · CPC title

• G01R31/3025 Primary

  Wireless interface with the DUT · CPC title