Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus

Patent metadata

Field	Value
Publication number	US-2016288032-A1
Application number	US-201615078017-A
Country	US
Kind code	A1
Filing date	Mar 23, 2016
Priority date	Mar 31, 2015
Publication date	Oct 6, 2016
Grant date	—

Abstract

A treatment solution supply method includes: a degassed treatment solution generating step of degassing a treatment solution by a degassing mechanism to generate a degassed treatment solution; a treatment solution storing step of storing the degassed treatment solution in a container; a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the treatment solution in the container through the filter; and a negative pressure maintaining step of maintaining a state in which the downstream side from the filter is brought to the negative pressure, for a predetermined period, after stopping supply of the treatment solution from the container to the filter.

First claim

What is claimed is:

1 . A treatment solution supply method of supplying a treatment solution onto a substrate, the method comprising:
a degassed treatment solution generating step of degassing the treatment solution by a degassing mechanism to generate a degassed treatment solution; a treatment solution storing step of storing the degassed treatment solution in a container; a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the degassed treatment solution in the container through the filter; and a negative pressure maintaining step of maintaining a state in which the downstream side from the filter is brought to the negative pressure, for a predetermined period, after stopping supply of the treatment solution from the container to the filter.

2 . The treatment solution supply method according to claim 1 ,
wherein the filter solution-passing step and the negative pressure maintaining step are repeatedly performed.

3 . A treatment solution supply method of supplying a treatment solution onto a substrate, the method comprising:
a degassed treatment solution generating step of degassing the treatment solution by a degassing mechanism to generate a degassed treatment solution; a treatment solution storing step of storing the degassed treatment solution in a container; a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the degassed treatment solution in the container through the filter; and a both-direction degassing step of reducing a pressure from an upstream side and the downstream side from the filter to degas the treatment solution.

4 . The treatment solution supply method according to claim 3 ,
wherein the filter solution-passing step and the both-direction degassing step are repeatedly performed.

5 . The treatment solution supply method according to claim 1 , further comprising:
a treatment solution discharging step of discharging a treatment solution stored in the container to an outside of the container before the degassed treatment solution generating step.

6 . The treatment solution supply method according to claim 3 , further comprising:
a treatment solution discharging step of discharging a treatment solution stored in the container to an outside of the container before the degassed treatment solution generating step.

7 . The treatment solution supply method according to claim 1 ,
wherein in the filter solution-passing step, a volume capacity of a storage chamber variable in volume capacity connected to the downstream side from the filter of the treatment solution supply pipe is increased to bring the downstream side from the filter to the negative pressure.

8 . The treatment solution supply method according to claim 3 ,
wherein in the filter solution-passing step, a volume capacity of a storage chamber variable in volume capacity connected to the downstream side from the filter of the treatment solution supply pipe is increased to bring the downstream side from the filter to the negative pressure.

9 . The treatment solution supply method according to claim 7 ,
wherein the container has another storage chamber variable in volume capacity, and wherein in the filter solution-passing step, a volume capacity of the another storage chamber is decreased with movement of the degassed treatment solution from the container to the filter.

10 . The treatment solution supply method according to claim 8 ,
wherein the container has another storage chamber variable in volume capacity, and wherein in the filter solution-passing step, a volume capacity of the another storage chamber is decreased with movement of the degassed treatment solution from the container to the filter.

11 . A non-transitory computer-readable storage medium storing a program running on a computer of a control unit for controlling a treatment solution supply apparatus to cause the treatment solution supply apparatus to perform a treatment solution supply method of supplying a treatment solution onto a substrate,
the treatment solution supply method comprising: a degassed treatment solution generating step of degassing the treatment solution by a degassing mechanism to generate a degassed treatment solution; a treatment solution storing step of storing the degassed treatment solution in a container; a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the degassed treatment solution in the container through the filter; and a negative pressure maintaining step of maintaining a state in which the downstream side from the filter is brought to the negative pressure, for a predetermined period, after stopping supply of the treatment solution from the container to the filter.

12 . A non-transitory computer-readable storage medium storing a program running on a computer of a control unit for controlling a treatment solution supply apparatus to cause the treatment solution supply apparatus to perform a treatment solution supply method of supplying a treatment solution onto a substrate,
the treatment solution supply method comprising: a degassed treatment solution generating step of degassing the treatment solution by a degassing mechanism to generate a degassed treatment solution; a treatment solution storing step of storing the degassed treatment solution in a container; a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the degassed treatment solution in the container through the filter; and a both-direction degassing step of reducing a pressure from an upstream side and the downstream side from the filter to degas the treatment solution.

13 . A treatment solution supply apparatus for supplying a treatment solution from a treatment solution supply source, via a treatment solution supply pipe, to a supply nozzle for supplying the treatment solution to a substrate, the apparatus comprising:
a container that temporarily stores the treatment solution supplied from the treatment solution supply source and is provided on an upstream side from the supply nozzle on the treatment solution supply pipe; a degassing mechanism that is provided between the treatment solution supply source and the container on the treatment solution supply pipe and degasses the treatment solution to generate a degassed treatment solution; a filter that is provided between the container and the supply nozzle on the treatment solution supply pipe; a storage chamber variable in volume capacity connected to a branch pipe branching off from between the filter and the supply nozzle on the treatment solution supply pipe; and a control unit, wherein the control unit is configured to: increase a volume capacity of the storage chamber to bring a downstream side from the filter of the treatment solution supply pipe to a negative pressure with respect to a pressure in the container to supply the degassed treatment solution in the container to the filter; and adjust the volume capacity of the storage chamber so as to maintain a state in which th

Assignees

• Tokyo Electron Ltd

Inventors

• Shite Hideo
• Kimura Kazuhiko
• Yumoto Tomoyuki

Classifications

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0448 Primary

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P76/00

  Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography · CPC title

• H10P95/00 Primary

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• B01D36/001 Primary

  Filters in combination with devices for the removal of gas, air purge systems · CPC title