Catalyst layer forming method, catalyst layer forming system and recording medium

Patent metadata

Field	Value
Publication number	US-2016247683-A1
Application number	US-201615047690-A
Country	US
Kind code	A1
Filing date	Feb 19, 2016
Priority date	Feb 23, 2015
Publication date	Aug 25, 2016
Grant date	—

Abstract

A catalyst adsorbed on a surface of a substrate is bound to the substrate without leaving residues within a recess of the substrate. A catalyst layer forming method includes forming a catalyst layer 22 by supplying a catalyst solution 32 onto a substrate 2 having a recess 2 a to adsorb the catalyst 22 A onto a surface of the substrate and onto an inner surface of the recess; rinsing the surface of the substrate 2 and an inside of the recess 2 a by supplying a rinse liquid; drying the surface of the substrate 2 and the inside of the recess 2 a . Further, by supplying a binder solution 34 containing a binder 22 B onto the substrate 2 , the catalyst 22 A on the surface of the substrate 2 is bound to the substrate 2 by the binder 22 B.

First claim

We claim:

1 . A catalyst layer forming method of forming a catalyst layer on a substrate, comprising:
preparing the substrate having a recess; forming a catalyst layer by supplying a catalyst solution containing a catalyst onto the substrate to adsorb the catalyst onto a surface of the substrate and onto an inner surface of the recess; rinsing the surface of the substrate and an inside of the recess by supplying a rinse liquid onto the substrate; drying the surface of the substrate and the inside of the recess; and binding the catalyst on the surface of the substrate to the surface of the substrate by supplying a binder solution containing a binder onto the substrate.

2 . A catalyst layer forming method of forming a catalyst layer on a substrate, comprising:
preparing the substrate having a recess; forming a catalyst layer by supplying a catalyst solution containing a catalyst onto the substrate to adsorb the catalyst onto a surface of the substrate and onto an inner surface of the recess; rinsing the surface of the substrate and an inside of the recess by supplying a rinse liquid onto the substrate; and binding the catalyst on the surface of the substrate to the surface of the substrate by supplying a binder solution containing a binder onto the substrate in a state that the rinse liquid is filled within the recess.

3 . The catalyst layer forming method of claim 1 ,
wherein the substrate is dried after the binder solution is supplied onto the substrate.

4 . The catalyst layer forming method of claim 1 ,
wherein the substrate is baked after the binder solution is supplied onto the substrate.

5 . The catalyst layer forming method of claim 4 ,
wherein the binder solution containing the binder is supplied onto the substrate again after the substrate is baked.

6 . The catalyst layer forming method of claim 1 ,
wherein the binder solution contains polyvinylPyrrolidone (PVP) as the binder.

7 . The catalyst layer forming method of claim 1 ,
wherein the catalyst solution contains n-Pd or palladium chloride as the catalyst.

8 . The catalyst layer forming method of claim 1 ,
wherein the catalyst solution further contains a dispersant.

9 . The catalyst layer forming method of claim 8 ,
wherein the catalyst solution contains polyvinylPyrrolidone (PVP) as the dispersant.

10 . A catalyst layer forming system of forming a catalyst layer on a substrate, comprising:
a substrate holding/rotating device configured to hold and rotate the substrate having a recess; a catalyst solution supply unit configured to supply a catalyst solution containing a catalyst onto the substrate to form the catalyst layer by adsorbing the catalyst onto a surface of the substrate and onto an inner surface of the recess; a rinse liquid supply unit configured to supply a rinse liquid to rinse the surface of the substrate and an inside of the recess; a substrate drying unit configured to dry the surface of the substrate and the inside of the recess; and a binder solution supply unit configured to supply a binder solution containing a binder onto the substrate to bind the catalyst on the surface of the substrate to the surface of the substrate.

11 . A catalyst layer forming system of forming a catalyst layer on a substrate, comprising:
a substrate holding/rotating device configured to hold and rotate the substrate having a recess; a catalyst solution supply unit configured to supply a catalyst solution containing a catalyst onto the substrate to form the catalyst layer by adsorbing the catalyst onto a surface of the substrate and onto an inner surface of the recess; a rinse liquid supply unit configured to supply a rinse liquid to rinse the surface of the substrate and an inside of the recess; and a binder solution supply unit configured to supply a binder solution containing a binder onto the substrate to bind the catalyst on the surface of the substrate to the surface of the substrate.

12 . The catalyst layer forming system of claim 10 ,
wherein the substrate holding/rotating device serves as the substrate drying unit.

13 . The catalyst layer forming system of claim 10 , further comprising:
a baking unit configured to bake the substrate after the binder solution is supplied onto the substrate.

14 . A computer-readable recording medium having stored thereon computer-executable instructions that, in response to execution, cause a catalyst layer forming system to perform a catalyst layer forming method,
wherein the catalyst layer forming method comprises: preparing the substrate having a recess; forming a catalyst layer by supplying a catalyst solution containing a catalyst onto the substrate to absorb the catalyst onto a surface of the substrate and onto an inner surface of the recess; rinsing the surface of the substrate and an inside of the recess by supplying a rinse liquid onto the substrate; drying the surface of the substrate and the inside of the recess; and binding the catalyst on the surface of the substrate to the surface of the substrate by supplying a binder solution containing a binder onto the substrate.

15 . A computer-readable recording medium having stored thereon computer-executable instructions that, in response to execution, cause a catalyst layer forming system to perform a catalyst layer forming method,
wherein the catalyst layer forming method comprises: preparing the substrate having a recess; forming a catalyst layer by supplying a catalyst solution containing a catalyst onto the substrate to absorb the catalyst onto a surface of the substrate and onto an inner surface of the recess; rinsing the surface of the substrate and an inside of the recess by supplying a rinse liquid onto the substrate; and binding the catalyst on the surface of the substrate to the surface of the substrate by supplying a binder solution containing a binder onto the substrate in a state that the rinse liquid is filled within the recess.

Assignees

• Tokyo Electron Ltd

Inventors

• Inatomi Yuichiro
• Tanaka Takashi
• Mizutani Nobutaka
• Saito Yusuke
• IWAI Kazutoshi
• Iwashita Mitsuaki

Classifications

• H10W20/0245

  comprising use of blind vias during the manufacture · CPC title

• H10W20/0261

  characterised by the filling method or the material of the conductive fill · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0406

  for cleaning followed by drying, rinsing, stripping, blasting or the like · CPC title

• H10W20/043

  for electroplating · CPC title