Template forming method, template, and template base material

Patent metadata

Field	Value
Publication number	US-2016247673-A1
Application number	US-201514844050-A
Country	US
Kind code	A1
Filing date	Sep 3, 2015
Priority date	Feb 24, 2015
Publication date	Aug 25, 2016
Grant date	—

Abstract

According to one embodiment, a template forming method is provided. In the template forming method, a template pattern is formed on a first surface of a substrate. A high liquid repellent property portion is formed in a region different from the template pattern on a side of the first surface of the substrate. The high liquid repellent property portion has a higher contacting angle with respect to a resist than a portion without the high liquid repellent property portion formed therein.

First claim

What is claimed is:

1 . A template forming method comprising:
forming a template pattern on a first surface of a substrate; and forming a high liquid repellent property portion in a region different from the template pattern on a side of the first surface of the substrate, the high liquid repellent property portion having a higher contacting angle with respect to a resist than a portion without the high liquid repellent property portion formed therein.

2 . The template forming method according to claim 1 , further comprising:
forming a pedestal region to be formed with the template pattern on the side of the first surface, wherein the high liquid repellent property portion is formed on a side surface of the pedestal region.

3 . The template forming method according to claim 1 , further comprising:
forming a pedestal region to be formed with the template pattern on the side of the first surface, wherein the high liquid repellent property portion is formed on a side surface of the pedestal region and a region on an outer side of the pedestal region.

4 . The template forming method according to claim 1 , wherein the high liquid repellent property portion is formed in a region on an outer side of a region to be formed with the template pattern.

5 . The template forming method according to claim 1 , wherein
a first protecting portion is arranged on the first surface, the high liquid repellent property portion is formed in a region other than the first protecting portion on the side of the first surface, and the first protecting portion is removed.

6 . The template forming method according to claim 5 , wherein the high liquid repellent property portion is formed by vapor depositing a first chemical on the side of the first surface of the substrate.

7 . The template forming method according to claim 5 , wherein the high liquid repellent property portion is formed by immersing the side of the first surface of the substrate in a second chemical.

8 . The template forming method according to claim 5 , wherein a second film is arranged on the high liquid repellent property portion, and dry etching or wet etching is carried out from above the second film to remove the first protecting portion.

9 . The template forming method according to claim 5 , wherein the first protecting portion is a film containing silane.

10 . The template forming method according to claim 5 , wherein the first protecting portion and the high liquid repellent property portion are simultaneously formed by vapor depositing a first chemical on the side of the first surface of the substrate or immersing the side of the first surface of the substrate in a second chemical.

11 . The template forming method according to claim 5 , wherein the first protecting portion is formed by forming a metal film or a semiconductor film on the first surface.

12 . The template forming method according to claim 5 , wherein the first protecting portion is a shielding member proximately arranged with respect to the first surface.

13 . The template forming method according to claim 2 , wherein the high liquid repellent property portion has a concave-convex shaped surface.

14 . The template forming method according to claim 13 , wherein an upper surface area of the convex portion is narrower than a bottom surface area of the concave portion.

15 . The template forming method according to claim 13 , wherein the high liquid repellent property portion repels the resist by lotus effect.

16 . The template forming method according to claim 1 , wherein the high liquid repellent property portion is formed by attaching a fluorinated solvent on the side of the first surface.

17 . The template forming method according to claim 1 , wherein the high liquid repellent property portion is formed by etching using a hydrofluoric acid and an alkaline liquid.

18 . The template forming method according to claim 1 , wherein the high liquid repellent property portion is formed by an ion implantation of antimony and etching using an alkaline liquid.

19 . A template comprising:
a template pattern arranged on a first surface of a substrate; and a high liquid repellent property portion formed in a region different from the template pattern on a side of the first surface of the substrate, the high liquid repellent property portion having a higher contacting angle with respect to a resist than a portion without the high liquid repellent property portion formed therein.

20 . A template base material comprising:
a pedestal region arranged on a side of a first surface of a substrate; and a high liquid repellent property portion arranged on a side surface of the pedestal region, the high liquid repellent property portion having a higher contacting angle with respect to a resist than an upper surface of the pedestal region.

Assignees

• Toshiba Kk

Inventors

• Tsuji Masatoshi
• Hatano Masayuki
• Komatsu Yohko
• Nakasugi Tetsuro

Classifications

• C23F1/16 Primary

  Acidic compositions (C23F1/42 takes precedence) · CPC title

• H01L21/0273 Primary

  Electricity · mapped topic

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title