Exposure apparatus and exposure method, and flat panel display manufacturing method
US-11086236-B2 · Aug 10, 2021 · US
Exposing sequentially with the same light pattern different positions of the same surface {(G03F7/70 takes precedence)}
Exposing sequentially with the same light pattern different positions of the same surface {(G03F7/70 takes precedence)} · Cooperative Patent Classification (CPC)
Computing, optics, measurement, and control technologies.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | G03F7/22 |
| Official title | Exposing sequentially with the same light pattern different positions of the same surface {(G03F7/70 takes precedence)} |
| Display label | Exposing sequentially with the same light pattern different positions of the same surface {(G03F7/70 takes precedence)} |
| Total patents | 115 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is declining.
| Year | Patents |
|---|---|
| 2015 | 4 |
| 2016 | 7 |
| 2017 | 7 |
| 2018 | 10 |
| 2019 | 14 |
| 2020 | 17 |
| 2021 | 12 |
| 2022 | 8 |
| 2023 | 12 |
| 2024 | 15 |
| 2025 | 7 |
| 2026 | 2 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Fabricating Devices with Reduced Isolation Regions
US-2020409273-A1 · Dec 31, 2020 · US
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
US-10866525-B2 · Dec 15, 2020 · US
Mask and fabrication method thereof, display panel and touch panel
US-10859920-B2 · Dec 8, 2020 · US
Inspection Apparatus and Methods, Substrates Having Metrology Targets, Lithographic System and Device Manufacturing Method
US-2020348605-A1 · Nov 5, 2020 · US
Method and apparatus for collecting information used in image-error compensation
US-2020348586-A1 · Nov 5, 2020 · US
Exposure apparatus and exposure method, and flat panel display manufacturing method
US-2020326638-A1 · Oct 15, 2020 · US
Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method
US-10761432-B2 · Sep 1, 2020 · US
Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method
US-2020264523-A1 · Aug 20, 2020 · US
Exposure apparatus and exposure method, and flat panel display manufacturing method
US-10732517-B2 · Aug 4, 2020 · US
Method and apparatus for dynamic lithographic exposure
US-2020241427-A1 · Jul 30, 2020 · US
Method and apparatus for collecting information used in image-error compensation
US-10712651-B2 · Jul 14, 2020 · US
Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method
US-10670977-B2 · Jun 2, 2020 · US
Method and apparatus for dynamic lithographic exposure
US-10663868-B2 · May 26, 2020 · US
Extreme Ultraviolet Mask With Backside Coating
US-2020133114-A1 · Apr 30, 2020 · US
Multi-level substrate coating film-forming composition containing plasma-curable compound based on unsaturated bonds between carbon atoms
US-2020124966-A1 · Apr 23, 2020 · US
Mask, exposure method and touch display panel
US-2020103750-A1 · Apr 2, 2020 · US
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
US-2020041915-A1 · Feb 6, 2020 · US
Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method
US-2019384179-A1 · Dec 19, 2019 · US
Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method
US-2019377271-A1 · Dec 12, 2019 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC G03F7/22?
- CPC G03F7/22 is the Cooperative Patent Classification code for “Exposing sequentially with the same light pattern different positions of the same surface {(G03F7/70 takes precedence)}.”
- How many patents are filed under CPC G03F7/22 (Exposing sequentially with the same light pattern different positions of the same surface {(G03F7/70 takes precedence)})?
- Our database includes 115 publications tagged with this CPC code.
- Is patent activity under CPC G03F7/22 growing?
- Publication counts under this code: 15 in 2024 vs 7 in 2025 (latest complete years).