Method for treatment of recessed structures in dielectric materials for smear removal

Patent metadata

Field	Value
Publication number	US-2016205783-A1
Application number	US-201414912169-A
Country	US
Kind code	A1
Filing date	Sep 5, 2014
Priority date	Sep 25, 2013
Publication date	Jul 14, 2016
Grant date	—

Abstract

The present invention relates to a method for treatment of recessed structures in a dielectric material for smear removal during the manufacture of printed circuit boards, IC substrates and the like. The dielectric material is contacted with an aqueous solution comprising 60 to 80 wt.-% sulfuric acid and 0.04 to 0.66 mol/l peroxodisulfate ions peroxodisulfate ions and at least one stabilizing additive selected from alcohols, molecular ethers and polymeric ethers. Smear is removed from the recessed structures by the method according to the present invention without penetration of process chemicals into the dielectric material and a sufficiently low copper etching rate is achieved. Furthermore, the shelf life of said aqueous solution is improved even in the presence of copper ions.

First claim

1 . A method for treatment of recessed structures in a dielectric material for smear removal comprising, in this order, the steps of
(i) providing a dielectric material comprising at least one recessed structure which contains residues of said dielectric material formed during manufacture of said recessed structures and (ii) contacting said dielectric material with an aqueous solution comprising 60 to 80 wt.-% sulfuric acid and 0.04 to 0.66 mol/l peroxo-disulfate ions and thereby removing said residues of dielectric material from the dielectric material wherein said aqueous solution further comprises at least one stabilizer additive selected from the group consisting of alcohols, molecular ethers and polymeric ethers.

2 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 wherein the dielectric material comprises a thermoplastic polymer selected from the group consisting of epoxy resins, polyimide, cyanate esters, polyester, acrylonitrile-butadiene-styrene copolymer, polycarbonates, acrylonitrile-butadiene-styrene-polycarbonate composites, polyamide and polycycloolefin.

3 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 wherein the dielectric material comprises copper structures and/or one or more copper layers.

4 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 wherein the concentration of sulfuric acid in the aqueous solution applied in step (ii) ranges from 65 to 75 wt.-%.

5 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 wherein the concentration of peroxodisulfate ions in the aqueous solution applied in step (ii) ranges from 0.12 to 0.44 mol/l.

6 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 wherein the stabilizer additive is selected from the group consisting of methanol, ethanol, 1-propanol, 2-propanol, 1-butanol, 2-butanol, tert-butanol, 1-pentanol, 2-pentanol, ethylene glycol, propylene glycol, butyl glycol, glycerine and polyvinylalcohol.

7 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 wherein the stabilizer additive is selected from the group consisting of ethylene glycol monoethyl ether, ethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monopropyl ether, diethylene glycol monobutyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol monopropyl ether, dipropylene glycol monobutylether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, triethylene glycol monopropyl ether, triethylene glycol monobutyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether, tripropylene glycol monopropyl ether, tripropylene glycol monobutyl ether and diethylene glycol monoisopropyl ether.

8 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 wherein the stabilizer additive is selected from the group consisting of poly-ethyleneglycol, poly-propyleneglycol, poly-(ethyleneglycol-ran-propyleneglycol), poly-(ethyleneglycol)-dock-poly-(propyleneglycol)-block-poly-(ethyleneglycol), and poly-(propyleneglycol)-block-poly-(ethyleneglycol)-block-poly-(propyleneglycol).

9 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 wherein the concentration of the stabilizer additive ranges from 0.5 to 300 mmol/l.

10 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 wherein the temperature of the aqueous solution is held during step (ii) at a temperature in the range of 10 to 80° C.

11 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 wherein the dielectric substrate is contacted in step (ii) with the aqueous solution for 1 to 60 min.

12 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 wherein the dielectric substrate is contacted prior to step (ii) with an aqueous solution comprising an organic solvent.

13 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 wherein the dielectric substrate is rinsed with water comprising an alkaline substance after step (ii).

14 . The method for treatment of recessed structures in a dielectric material for smear removal according to claim 1 , further comprising the steps of
(iii) contacting said dielectric substrate with a solution comprising ions and/or colloids of a catalytic metal which initiates electroless copper plating and (iv) contacting said dielectric substrate with an electroless copper plating bath composition and thereby depositing a first copper layer onto the activated dielectric substrate.

15 . An aqueous solution for treatment of recessed structures in a dielectric material for smear removal comprising 60 to 80 wt.-% sulfuric acid and 0.04 to 0.66 mol/l peroxodisulfate ions and at least one stabilizer additive selected from the group consisting of alcohols, molecular ethers and polymeric ethers.

Assignees

• Atotech Deutschland Gmbh

Inventors

• Steinhäuser Edith
• Wiese Stefanie
• Gregoriades Laurence John
• Schiemann Julia
• Stamp Lutz

Classifications

• C23C18/30

  Activating {or accelerating or sensitising with palladium or other noble metal} · CPC title

• H05K2203/0789

  Aqueous acid solution, e.g. for cleaning or etching · CPC title

• C23G1/103 Primary

  copper or alloys of copper · CPC title

• C11D7/10

  Salts · CPC title

• C23C18/40

  using reducing agents · CPC title