Wiring circuit board, semiconductor device, method of manufacturing wiring circuit board, and method of manufacturing semiconductor device
US-2017250141-A1 · Aug 31, 2017 · US
US10653011B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10653011-B2 |
| Application number | US-201715817052-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 17, 2017 |
| Priority date | Oct 13, 2017 |
| Publication date | May 12, 2020 |
| Grant date | May 12, 2020 |
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A method for manufacturing the circuit board comprises following steps of providing an insulating substrate, and defining at least one through-hole on the insulating substrate to extending through two opposite surfaces of the insulating substrate; forming a silver layer on each of the two opposite surfaces, and forming a silver conductive structure in each through-hole connecting the silver layers; forming a copper wiring layer on the silver layers to cover each silver conductive structure and a portion region of the silver layers; and etching the silver layers to form a silver wiring layer corresponding to the copper wiring layer, wherein a first etching liquid, which does not etch the copper wiring layer, is used for etching the silver layers.
Opening claim text (preview).
What is claimed is: 1. A method for manufacturing the circuit board comprising: providing an insulating substrate, and defining at least one through-hole on the insulating substrate to extend through two opposite surfaces of the insulating substrate; forming a silver layer on each of the two opposite surfaces, and forming a silver conductive structure in each of the at least one through-hole connecting the silver layers; forming a copper wiring layer on the silver layers to cover each silver conductive structure and a portion region of the silver layers; and etching the silver layers to form a silver wiring layer corresponding to the copper wiring layer, wherein a first etching liquid, which does not etch the copper wiring layer, is used for etching the silver layers; a width of each line of the silver wiring layer is less than a width of a corresponding line of the copper wiring layer, and a spacing between two lines of the silver wiring layer is greater than a spacing between two corresponding lines of the copper wiring layer. 2. The method of the claim 1 , wherein the silver layers and the at least one silver conductive structure are formed by the following steps: coating a silver paste with nano silver particles on the opposite surfaces of the insulating substrate and the at least one through-hole; and heating to cure the silver paste with nano silver particles, thereby forming a silver layer on each of the two opposite surfaces, and forming a silver conductive structure in each of the at least one through-hole to connect each silver layer. 3. The method of the claim 2 , wherein a diameter of each nano silver particle is less than 100 nm. 4. The method of the claim 1 , wherein each silver layer has a thickness of about 0.15 μm to about 0.3 μm. 5. The method of the claim 1 , wherein the copper wiring layer is formed by the following steps: forming a photosensitive layer on a side of each silver layer away from the insulating substrate to cover the silver layer and each silver conductive structure; exposing and etching two photosensitive layers to form a pattern on the photosensitive layers to expose each silver conductive structure and a portion region of two silver layers, the pattern comprising an opening corresponding to each silver conductive structure; forming a copper wiring layer corresponding to the pattern to cover each silver conductive structure and the portion region of the silver layers; and peeling the photosensitive layers exposed and etched off. 6. The method of the claim 1 , wherein after etching the silver layers to form the silver wiring layer corresponding to the copper wiring layer, the method further comprises: etching the insulating substrate which is not covered by the copper wiring layers with a second etching liquid, to remove the remained silver layers after forming the silver wiring layer; wherein the second etching liquid, which does not etch the copper wiring layer and the silver wiring layer, is used for etching the insulating substrate.
Etchants · CPC title
Improvement of the adhesion between the insulating substrate and the metal · CPC title
Intermediate metal, e.g. before reinforcing of conductors by plating · CPC title
Local etching · CPC title
by thick-film techniques · CPC title
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