Wafer clamp detection based on vibration or acoustic characteristic analysis

Patent metadata

Field	Value
Publication number	US-2016187302-A1
Application number	US-201514963703-A
Country	US
Kind code	A1
Filing date	Dec 9, 2015
Priority date	Dec 26, 2014
Publication date	Jun 30, 2016
Grant date	—

Abstract

A workpiece clamping status detection system and method for detecting a clamping state of a clamping device is provided. A clamping device having a clamping surface is configured to selectively clamp a workpiece to the clamping surface. The clamping device may be an electrostatic chuck or a mechanical clamp for selectively securing a semiconductor wafer thereto. A vibration-inducing mechanism is further provided, wherein the vibration-inducing mechanism is configured to selectively vibrate one or more of the clamping device and workpiece. A vibration-sensing mechanism is also provided, wherein the vibration-sensing mechanism is configured to detect the vibration of the one or more of the clamping device and workpiece. Detection of clamping status utilizes changes in acoustic properties, such as a shift of natural resonance frequency or acoustic impedance, to determine clamping condition of the workpiece. A controller is further configured to determine a clamping state associated with the clamping of the workpiece to the clamping surface, wherein the clamping state is associated with the detected vibration of the one or more of the clamping device and workpiece.

First claim

1 . A workpiece clamping status detection system, comprising:
a clamping device having a clamping surface, wherein the clamping device is configured to selectively clamp a workpiece to the clamping surface; a vibration-inducing mechanism, wherein the vibration-inducing mechanism is configured to selectively vibrate one or more of the clamping device and workpiece; a vibration-sensing mechanism, wherein the vibration-sensing mechanism is configured to detect the vibration of the one or more of the clamping device and workpiece; and a controller configured to determine a clamping state associated with the clamping of the workpiece to the clamping surface, wherein the clamping state is associated with the detected vibration of the one or more of the clamping device and workpiece.

2 . The workpiece clamping status detection system of claim 1 , wherein the vibration-inducing mechanism comprises an acoustic device.

3 . The workpiece clamping status detection system of claim 2 , wherein the acoustic device comprises vibration transmitter comprising an audio speaker.

4 . The workpiece clamping status detection system of claim 2 , wherein the vibration-sensing mechanism comprises an accelerometer comprising a microphone.

5 . The workpiece clamping status detection system of claim 1 , wherein the vibration-inducing mechanism comprises an ultrasound emitter, and wherein the vibration-sensing mechanism comprises an ultrasound receiver.

6 . The workpiece clamping status detection system of claim 5 , wherein the ultrasound transmitter and ultrasound receiver are defined by an ultrasound transducer.

7 . The workpiece clamping status detection system of claim 1 , wherein the controller is configured to differentiate an impedance pattern associated with the clamping state.

8 . The workpiece clamping status detection system of claim 1 , wherein the clamping device comprises an electrostatic clamp, and wherein the clamping surface comprises a generally planar surface configured to electrostatically clamp the workpiece thereto.

9 . The workpiece clamping status detection system of claim 1 , wherein the clamping device comprises a mechanical clamp.

10 . The workpiece clamping status detection system of claim 9 , wherein the mechanical clamp comprises one or more grippers configured to selectively grip a peripheral edge of the workpiece.

11 . The workpiece clamping status detection system of claim 1 , wherein the vibration-sensing mechanism comprises a laser apparatus, wherein the laser apparatus is configured to direct a laser beam toward a surface of the workpiece and to detect a modulation of a received reflection of the laser beam from the surface of the workpiece, wherein the modulation of the received reflection of the laser beam is associated with the vibration of the workpiece with respect to the clamping device.

12 . The workpiece clamping status detection system of claim 1 , wherein a mass of the workpiece is less than a mass of the clamping device.

13 . A method for detecting a clamping status of a workpiece in a clamping device, the method comprising:
clamping a surface of the workpiece to a clamping surface of the clamping device; inducing a vibration within one or more of the clamping device and workpiece; detecting the vibration of the one or more of the clamping device and workpiece; and determining a clamping state associated with the clamping of the workpiece to the clamping surface, wherein the clamping state is associated with a resonant frequency of the detected vibration of the one or more of the clamping device and workpiece.

14 . The method of claim 13 , wherein inducing the vibration within one or more of the clamping device and workpiece comprises emitting sound waves toward one or more of the clamping device and workpiece.

15 . The method of claim 14 , wherein detecting the vibration of the one or more of the clamping device and workpiece comprises detecting the sound waves once the sound waves bounce off the one or more of the clamping device and workpiece.

16 . The method of claim 13 , wherein detecting the vibration of the one or more of the clamping device and workpiece comprises:
directing a laser beam toward a surface of the workpiece; receiving a reflection of the laser beam from the surface of the workpiece; and determining a modulation of the received reflection of the laser beam from the surface of the workpiece, wherein the modulation of the received reflection of the laser beam is associated with the vibration of the workpiece with respect to the clamping device.

17 . The method of claim 13 , wherein clamping a surface of the workpiece to a clamping surface of the clamping device comprises electrostatically clamping the surface of the workpiece to a generally planar surface of an electrostatic clamp.

18 . The method of claim 13 , wherein clamping a surface of the workpiece to a clamping surface of the clamping device comprises mechanically clamping a peripheral edge of the workpiece to via a mechanical clamp.

Assignees

• Axcelis Tech Inc

Inventors

• Satoh Shu

Classifications

• H10P74/20

  characterised by the properties tested or measured, e.g. structural or electrical properties · CPC title

• H10P72/0616 Primary

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title

• H10P72/0606 Primary

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• G01N2291/014

  Resonance or resonant frequency · CPC title